Title:
SCINTILLATOR PLATE, RADIATION DETECTOR, AND METHOD FOR MANUFACTURING SCINTILLATOR PLATE
Document Type and Number:
WIPO Patent Application WO/2023/095632
Kind Code:
A1
Abstract:
A scintillator plate having: a columnar crystal that is formed on a substrate, emits light corresponding to radiation with which the columnar crystal is irradiated, and has a prescribed column diameter; and a protective film that is provided so as to cover the columnar crystal, is used for protecting the columnar crystal from water vapor, and has a prescribed thickness. The scintillator plate is characterized in that the value of the arithmetic average roughness of the protective film is equal to or less than the value of the column diameter, and the value of the thickness of the protective film is no more than four times the value of the column diameter.
Inventors:
OIKE TOMOYUKI (JP)
Application Number:
PCT/JP2022/041932
Publication Date:
June 01, 2023
Filing Date:
November 10, 2022
Export Citation:
Assignee:
CANON KK (JP)
International Classes:
G01T1/20; G01T1/202; G21K4/00
Foreign References:
| JP2014009991A | 2014-01-20 | |||
| JP2017036922A | 2017-02-16 | |||
| JP2008008741A | 2008-01-17 | |||
| JP2009034428A | 2009-02-19 |
Attorney, Agent or Firm:
ABE Takuma et al. (JP)
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