Title:
SCRIBE TABLE AND SCRIBE DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/014307
Kind Code:
A1
Abstract:
This scribe table (6) comprises grooves (62a to 62c) that are formed in a mounting surface (61) on which a frame unit (20) is mounted, and suction holes (63a to 63c) that are connected to the grooves (62a to 62c). The grooves (62a to 62c) have the shape of a partially interrupted loop in plan view and are formed in a region corresponding to a gap (G1) between the inner periphery of an opening (21a) in a frame ring (21) and the outer periphery of a workpiece (23). A degassing region (64) in which the grooves (62a to 62c) are interrupted is disposed on the side opposite the suction holes (63a to 63c) with respect to the center of the loop.
Inventors:
NISHIO YOSHITAKA (JP)
Application Number:
PCT/JP2023/024265
Publication Date:
January 18, 2024
Filing Date:
June 29, 2023
Export Citation:
Assignee:
MITSUBOSHI DIAMOND IND CO LTD (JP)
International Classes:
B28D7/04; B28D5/00; C03B33/03; H01L21/301
Domestic Patent References:
| WO2020137543A1 | 2020-07-02 | |||
| WO2013136411A1 | 2013-09-19 |
Foreign References:
| JP2009065108A | 2009-03-26 | |||
| JP2009045926A | 2009-03-05 | |||
| JP2016162800A | 2016-09-05 |
Attorney, Agent or Firm:
SHIBANO, Masanori et al. (JP)
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