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Title:
SCRUB MEMBER STORAGE CONTAINER AND PACKAGE THEREFOR
Document Type and Number:
WIPO Patent Application WO/2019/098229
Kind Code:
A1
Abstract:
Provided is a scrub member storage container that includes a container body and a lid which engages with the container body. The scrub member is accommodated in the storage container interior which is surrounded by the container body and the lid. A ventilation groove that enables communication between the storage container interior and the storage container exterior is formed at the engagement surface where the container body and the lid engage.

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Inventors:
NAKANO HISAJIRO (JP)
ISHIBASHI TOMOATSU (JP)
Application Number:
PCT/JP2018/042109
Publication Date:
May 23, 2019
Filing Date:
November 14, 2018
Export Citation:
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Assignee:
EBARA CORP (JP)
International Classes:
B65D81/26; B65D51/16; H01L21/304
Foreign References:
JPS51113702U1976-09-14
JP2008068900A2008-03-27
JP2009012803A2009-01-22
JP2014508687A2014-04-10
JP2015110445A2015-06-18
JP2003292562A2003-10-15
JP2015181153A2015-10-15
JP2003017454A2003-01-17
Attorney, Agent or Firm:
TANAI Sumio et al. (JP)
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