Title:
SEAL MECHANISM, DRIVE DEVICE FOR SEAL MECHANISM, TRANSPORT DEVICE, AND MANUFACTURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/087933
Kind Code:
A1
Abstract:
A seal mechanism that separates two spaces having different pressures, said seal mechanism being equipped with: a housing; a shaft inserted into the housing; an annular seal member that makes contact with the radially outside surface of the shaft or with the radially outside surface of a rotary part affixed to the shaft, thereby sealing a gap; and a lubricant groove storing a lubricant supplied between the annular seal member and the radially outside surface.
Inventors:
HIGUCHI HIDEYA (JP)
NAKAMURA TSUYOSHI (JP)
KON HIDEKI (JP)
NAKAMURA TSUYOSHI (JP)
KON HIDEKI (JP)
Application Number:
PCT/JP2014/082743
Publication Date:
June 18, 2015
Filing Date:
December 10, 2014
Export Citation:
Assignee:
NSK LTD (JP)
International Classes:
F16J15/32; F16C33/76; H01L21/677
Foreign References:
| JP2002228010A | 2002-08-14 | |||
| JP2013204792A | 2013-10-07 | |||
| JP2001099326A | 2001-04-10 | |||
| JP2007009939A | 2007-01-18 |
Other References:
See also references of EP 3081835A4
Attorney, Agent or Firm:
SAKAI, HIROAKI (JP)
Hiroaki Sakai (JP)
Hiroaki Sakai (JP)
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