SEALING DEVICE AND CONVEYANCE DEVICE

Title:

SEALING DEVICE AND CONVEYANCE DEVICE

Document Type and Number:

WIPO Patent Application WO/2012/008156

Kind Code:

A1

Abstract:

Disclosed are a conveyance device and a sealing device wherein the need to take the device apart is eliminated, thereby reducing cost, time and labour on the part of an operator, and suppressing wasteful consumption of energy of a power source. An operator lowers an adjustment screw (7) whilst making the adjustment screw (7) come into contact with the upper surface of a pressing-force ring (9), and lowers the pressing-force ring (9). Thus, the pressing-force ring (9) presses a sealing ring (13), and the sealing ring (13) is collapsed. After the expected sealing properties of the sealing ring (13) have been secured in this manner, the operator fixes the pressing-force ring (9) to a cover (8) by means of a fixing screw (6). Thus, the sealing force of the sealing ring (13) can be adjusted, as appropriate.

Inventors:

YOSHINO, Takahiro (INC. 2500 Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
吉野　孝広 (〒43 神奈川県茅ヶ崎市萩園２５００番地株式会社アルバック内 Kanagawa, 〒2538543, JP)
NAKAO, Hirotoshi (INC. 2500 Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)

Application Number:

JP2011/004018

Publication Date:

January 19, 2012

Filing Date:

July 13, 2011

Export Citation:

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Assignee:

ULVAC, INC. (2500 Hagisono, Chigasaki-shi Kanagawa, 43, 〒2538543, JP)
株式会社アルバック (〒43 神奈川県茅ヶ崎市萩園２５００番地 Kanagawa, 〒2538543, JP)
YOSHINO, Takahiro (INC. 2500 Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
吉野　孝広 (〒43 神奈川県茅ヶ崎市萩園２５００番地株式会社アルバック内 Kanagawa, 〒2538543, JP)

International Classes:

F16J15/18; B25J19/00; H01L21/677

Attorney, Agent or Firm:

OMORI, Junichi (2nd Floor U&M Akasaka Bldg, 7-5-47 Akasaka Minato-k, Tokyo 52, 〒1070052, JP)

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