Title:
SECONDARY ELECTRON MULTIPLIER, ION DETECTION DEVICE, AND ION DETECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2010/125671
Kind Code:
A1
Abstract:
Provided are a secondary electron multiplier, an ion detection device, and an ion detection method which enable a reduction in the influence of stray light remaining in an Off-Axis structure for reducing the influence of the stray light and an improvement in S/N ratio. In a secondary electron multiplier (11), ions (13) are injected from the lateral side of an electron generation plane (100) of an electrode (D1) that is an initial stage electrode of the secondary electron multiplier (11).
Inventors:
NAKAMURA Megumi (2-5-1 Kurigi, Asao-ku, Kawasaki-sh, Kanagawa 50, 〒2158550, JP)
中村 恵 (〒50 神奈川県川崎市麻生区栗木２－５－１ キヤノンアネルバ株式会社内 Kanagawa, 〒2158550, JP)
SHIOKAWA Yoshiro (2-5-1 Kurigi, Asao-ku, Kawasaki-sh, Kanagawa 50, 〒2158550, JP)
中村 恵 (〒50 神奈川県川崎市麻生区栗木２－５－１ キヤノンアネルバ株式会社内 Kanagawa, 〒2158550, JP)
SHIOKAWA Yoshiro (2-5-1 Kurigi, Asao-ku, Kawasaki-sh, Kanagawa 50, 〒2158550, JP)
Application Number:
JP2009/058467
Publication Date:
November 04, 2010
Filing Date:
April 30, 2009
Export Citation:
Assignee:
CANON ANELVA CORPORATION (2-5-1, Kurigi Asao-ku, Kawasaki-sh, Kanagawa 50, 〒2158550, JP)
キヤノンアネルバ株式会社 (〒50 神奈川県川崎市麻生区栗木２－５－１ Kanagawa, 〒2158550, JP)
NAKAMURA Megumi (2-5-1 Kurigi, Asao-ku, Kawasaki-sh, Kanagawa 50, 〒2158550, JP)
中村 恵 (〒50 神奈川県川崎市麻生区栗木２－５－１ キヤノンアネルバ株式会社内 Kanagawa, 〒2158550, JP)
キヤノンアネルバ株式会社 (〒50 神奈川県川崎市麻生区栗木２－５－１ Kanagawa, 〒2158550, JP)
NAKAMURA Megumi (2-5-1 Kurigi, Asao-ku, Kawasaki-sh, Kanagawa 50, 〒2158550, JP)
中村 恵 (〒50 神奈川県川崎市麻生区栗木２－５－１ キヤノンアネルバ株式会社内 Kanagawa, 〒2158550, JP)
International Classes:
H01J49/06; H01J43/04; H01J43/10; H01J43/18; H01J43/22; H01J49/42
Attorney, Agent or Firm:
OKABE Masao et al. (No. 602, Fuji Bldg. 2-3, Marunouchi 3-chome, Chiyoda-k, Tokyo 05, 〒1000005, JP)