SELECTIVE BONDING FOR FORMING A MICROVALVE

Title:

SELECTIVE BONDING FOR FORMING A MICROVALVE

Document Type and Number:

WIPO Patent Application WO2005091820

Kind Code:

A3

Abstract:

A method for forming a microvalve is disclosed. The method includes providing a first silicon layer (12) and a second silicon layer (14), etching the second silicon layer to form a slider portion (40), coating a coating material onto the slider portion (40), bonding the first silicon layer (12) to the second silicon layer (14), wherein the coating material separates the slider portion (40) from the first silicon layer (12) and prevent the slider portion (40) from bonding to the first silicon layer (12).

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Inventors:

DAVIES BRADY REUBEN (US)

Application Number:

PCT/US2005/004821

Publication Date:

October 26, 2006

Filing Date:

February 15, 2005

Export Citation:

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Assignee:

ALUMINA MICRO LLC (US)
DAVIES BRADY REUBEN (US)

International Classes:

A63B37/02; A63B39/00; B29C65/00; B29C65/02; B32B37/00; B32B38/04; B29C65/48; B32B5/02

Foreign References:

US6096149A	2000-08-01
US6116863A	2000-09-12

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