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Title:
SELF-ASSEMBLING COMPOSITION FOR PATTERN FORMATION USE, AND PATTERN FORMATION METHOD
Document Type and Number:
WIPO Patent Application WO/2017/110190
Kind Code:
A1
Abstract:
The present invention addresses the problem of providing a self-assembling composition for pattern formation use, whereby it becomes possible to form a good phase-separated structure even when it is intended to form a large-size pattern. The present invention also addresses the problem of providing a self-assembling composition for pattern formation use, whereby it becomes possible to form a pattern by a simple process without requiring the provision of an under layer upon the formation of a fine pattern structure. The present invention relates to a self-assembling composition for pattern formation use, said self-assembling composition being characterized by containing a block copolymer that contains a polymer segment a and a polymer segment b, wherein the polymer segment a contains at least two units of at least one type of unit selected from a glucose unit and a xylose unit and the polymer segment b contains at least two units of at least one type of unit selected from an aromatic-ring-containing unit, a silicon-containing unit and a metal-containing unit.

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Inventors:
MORITA KAZUYO (JP)
Application Number:
PCT/JP2016/078785
Publication Date:
June 29, 2017
Filing Date:
September 29, 2016
Export Citation:
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Assignee:
OJI HOLDINGS CORP (JP)
International Classes:
C08G81/00
Foreign References:
JP2014527089A2014-10-09
JP2013539420A2013-10-24
JP2010091630A2010-04-22
JP2007314585A2007-12-06
JP2003048901A2003-02-21
JP2014005325A2014-01-16
JP2012100546A2012-05-31
JP2012180424A2012-09-20
JP2014148629A2014-08-21
JPS5729537B21982-06-23
Other References:
TOSHIBA REVIEW, vol. 67, no. 4, 2012, pages 44 - 47
MACROMOLECULES, vol. 36, no. 6, 2003
"Material Matters", vol. 5, SIGMA-ALDRICH, article "Saishin Kobunshi Gosei (Latest Polymer Synthesis"
JOURNAL OF POLYMER SCIENCE PART B POLYMER PHYSICS, vol. 43, pages 1214 - 1219
MACROMOL. CHEM. PHYS, vol. 209, 2008, pages 1282 - 1290
Attorney, Agent or Firm:
SIKS & CO. (JP)
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