Title:
SELF-DIAGNOSIS METHOD FOR FLOW RATE CONTROL DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/107216
Kind Code:
A1
Abstract:
This self-diagnosis method for a flow rate control device includes: a step (a) for measuring pressure drop characteristics after a pressure control valve (6) has been changed to a closed state from a state where a fluid flows from the upstream side of the pressure control valve with the opening of a flow rate control valve (8) set larger than that of a diaphragm; a step (b) for measuring pressure drop characteristics after the pressure control valve has been changed to a closed state from a state where the fluid flows from the upstream side of the pressure control valve to the downstream side with the opening of the flow rate control valve set smaller than that of the diaphragm; a step (c) for determining whether there is an abnormality by comparing the pressure drop characteristics measured in the step (a) with corresponding reference pressure drop characteristics; a step (d) for determining whether there is an abnormality by comparing the pressure drop characteristics measured in the step (b) with corresponding reference pressure drop characteristics; and a step (e) for determining that there is an abnormality in the flow rate control valve when it is determined, only in the step (d), that there is an abnormality.
Inventors:
SUGITA KATSUYUKI (JP)
DOHI RYOUSUKE (JP)
HIRATA KAORU (JP)
KAWADA KOJI (JP)
IKEDA NOBUKAZU (JP)
NISHINO KOUJI (JP)
DOHI RYOUSUKE (JP)
HIRATA KAORU (JP)
KAWADA KOJI (JP)
IKEDA NOBUKAZU (JP)
NISHINO KOUJI (JP)
Application Number:
PCT/JP2018/042797
Publication Date:
June 06, 2019
Filing Date:
November 20, 2018
Export Citation:
Assignee:
FUJIKIN KK (JP)
International Classes:
G05D7/06
Foreign References:
| JP2004157719A | 2004-06-03 | |||
| JP4308356B2 | 2009-08-05 |
Attorney, Agent or Firm:
TANIDA Ryuichi et al. (JP)
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