Title:
SELF-SHARPENING POLISHING DEVICE IN DYNAMIC MAGNETIC FIELD FOR MAGNETORHEOLOGICAL FLEXIBLE POLISHING PAD AND POLISHING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2017/084211
Kind Code:
A1
Abstract:
Disclosed are a self-sharpening polishing device in a dynamic magnetic field for a magnetorheological flexible polishing pad and a polishing method therefor. The device comprises a polishing disk revolution mechanism and a synchronous rotation driving mechanism with multiple magnetic poles, wherein the polishing disk revolution mechanism comprises a transmission shaft electric motor (37), a transmission shaft (13), a transferring disk (11), an eccentric shaft fixing disk (3), a cup-like polishing disk (1), and a transmission shaft transmission mechanism. The synchronous rotation driving mechanism with multiple magnetic poles comprises an eccentric main shaft (43), a synchronous rotation driving disk (8), a flexible eccentric rotation shaft (19), an eccentric sleeve (20), magnetic poles (21), an eccentric shaft fixing disk (3), and a main shaft electric motor (17) and the like. The whole process from rough polishing to fine polishing can be realized by one pass of processing at a high processing efficiency, and the surface of the workpiece obtained is of good uniformity without surface or subsurface damages. The device is low in cost, and is suitable for ultra-smooth and uniform polishing processing for a plane of an optical element with a large diameter at a high efficiency.
Inventors:
PAN JISHENG (CN)
YAN QIUSHENG (CN)
GAO WEIQIANG (CN)
YU PENG (CN)
YAN QIUSHENG (CN)
GAO WEIQIANG (CN)
YU PENG (CN)
Application Number:
PCT/CN2016/072318
Publication Date:
May 26, 2017
Filing Date:
January 27, 2016
Export Citation:
Assignee:
UNIV GUANGDONG TECHNOLOGY (CN)
International Classes:
B24B1/00
Foreign References:
| CN103072069A | 2013-05-01 | |||
| CN100999061A | 2007-07-18 | |||
| CN205237716U | 2016-05-18 | |||
| JPH11333677A | 1999-12-07 |
Attorney, Agent or Firm:
YOGO PATENT & TRADE MARK AGENCY LIMITED COMPANY (CN)
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