Title:
SEMICONDUCTIVE CERAMIC MEMBER AND HOLDER FOR WAFER CONVEYANCE
Document Type and Number:
WIPO Patent Application WO/2018/139673
Kind Code:
A1
Abstract:
A semiconductive ceramic member according to this disclosure is composed of an alumina ceramic which contains α-alumina and titanium oxide. This semiconductive ceramic member contains 89-95% by mass of Al in terms of Al2O3 and 5-11% by mass of Ti in terms of TiO2. If the total of the Al amount in terms of Al2O3 and the Ti amount in terms of TiO2 is taken as 100 parts by mass, this semiconductive ceramic member contains 0.02-0.6 part by mass of Ca and Ce in total, respectively in terms of CaO and CeO2, relative to the 100 parts by mass. In addition, this semiconductive ceramic member has a bulk duty of 3.7 g/cm3 or more. This semiconductive ceramic member has a peak of TiOx (0 < x <2) within the binding energy range of 456-462 eV as determined by X-ray photoelectron spectroscopy. In addition, the surface of this semiconductive ceramic member has a lightness index L* of from 40 to 60 (inclusive) and a ∆L* of 1 or less.
Inventors:
TATEYAMA YASUHARU (JP)
KOHSAKA SHOJI (JP)
KOHSAKA SHOJI (JP)
Application Number:
PCT/JP2018/002963
Publication Date:
August 02, 2018
Filing Date:
January 30, 2018
Export Citation:
Assignee:
KYOCERA CORP (JP)
International Classes:
H01L21/673; B25J15/00; C04B35/117; H01L21/677
Foreign References:
| JP2007223842A | 2007-09-06 | |||
| JP2006210546A | 2006-08-10 | |||
| JP2011168420A | 2011-09-01 |
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