Title:
SEMICONDUCTIVE CERAMIC MEMBER
Document Type and Number:
WIPO Patent Application WO/2020/071178
Kind Code:
A1
Abstract:
A semiconductive ceramic member according to the present disclosure contains a plurality of aluminum oxide crystal grains and a plurality of titanium oxide crystal grains. The total amount of aluminum oxide and titanium oxide in 100% by mass of all the components is 99% by mass or more. The amount of the aluminum oxide in 100% by mass of the total of the aluminum oxide and the titanium oxide is from 86% by mass to 96% by mass (inclusive); and the amount of the titanium oxide in 100% by mass of the total of the aluminum oxide and the titanium oxide is from 4% by mass to 14% by mass (inclusive). In a measurement by X-ray photoelectron spectroscopy, there is a peak of TiOx (0 < x < 2) within the binding energy range of from 456 eV to 462 eV (inclusive). This semiconductive ceramic member additionally contains silicon; and the content of the silicon in terms of oxide in a first region is higher than the content of the silicon in terms of oxide at the grain boundary.
Inventors:
TATEYAMA YASUHARU (JP)
HIRANO YOSHINORI (JP)
FUJITA NAOYA (JP)
TSUJITAKE SENRI (JP)
KOHSAKA SHOJI (JP)
HIRANO YOSHINORI (JP)
FUJITA NAOYA (JP)
TSUJITAKE SENRI (JP)
KOHSAKA SHOJI (JP)
Application Number:
PCT/JP2019/037299
Publication Date:
April 09, 2020
Filing Date:
September 24, 2019
Export Citation:
Assignee:
KYOCERA CORP (JP)
International Classes:
H01L21/683; C04B35/117
Domestic Patent References:
| WO2018139673A1 | 2018-08-02 |
Foreign References:
| JP2017183470A | 2017-10-05 |
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