SEMICONDUCTOR COMPONENTS AND SYSTEMS HAVING

ENCAPSULATED THROUGH WIRE INTERCONNECTS (TWI) AND

WAFER LEVEL METHODS OF FABRICATION

Background

[0001] In semiconductor manufacture, packaging is the final operation that transforms a semiconductor substrate into a functional semiconductor component. Typically, the semiconductor substrate is in the form of a semiconductor die. Packaging provides protection for the semiconductor substrate, a signal transmission system for the integrated circuits on the semiconductor substrate, and external connection points for the component. In response to the demand for smaller, lighter and thinner consumer products, new semiconductor components and new packaging methods are being developed. The new components include high pin count single die packages, such as fine ball grid array (FBGA) packages, and multi dice packages, such as stacked packages and systems in a package (SIP).

[0002] The new packaging methods include wafer level packaging (WLP), stacking of multiple semiconductor dice, and 3D packaging. With wafer level packaging (WLP), all of the packaging operations are performed on a semiconductor wafer containing multiple identical semiconductor substrates. In addition, all of the interconnects for a semiconductor component are located within the peripheral outline of the component. Following wafer level packaging (WLP), the semiconductor components are singulated from the wafer into chip scale components. In general, wafer level packaging (WLP) provides smaller components and low cost volume manufacture.

[0003] With stacking, two or more semiconductor components are stacked and interconnected into a stacked system. A signal transmission system for a stacked system includes interconnects which electrically connect adjacent stacked components. In addition, the signal transmission system must provide terminal contacts for inputting and outputting signals into the system. The signal transmission system for a 3D component includes interconnects that are vertically integrated, and not necessarily planar to the major planar surfaces of the component. For example, interconnects in the form of through wafer conductive vias can provide signal paths between opposing planar surfaces of a semiconductor component.

[0004] In general, new types of interconnects have been developed for implementing signal transmission systems to and from the integrated circuits contained on the components. These interconnects must satisfy demanding electrical requirements. For example, the interconnects must be capable of a high density configuration, with minimal signal path lengths and minimal cross talk. The interconnects must also have the ability to accommodate thermal mechanical stresses, and to provide power distribution with controlled impedance over a wide frequency range. In addition, the interconnects must be capable of reliable manufacture using readily available, or easily modifiable, semiconductor assembly equipment.

[0005] Various embodiments of through wire interconnects to be further described are able to satisfy the above requirements. In addition, the through wire interconnects provide a signal transmission system with 3-D integration, and with contacts suitable for stacking multiple semiconductor components, or for mounting semiconductor components to a next level substrate. Further, the through wire interconnects are capable of volume manufacture in reliable configurations using semiconductor assembly equipment.

[0006] However, the foregoing examples of the related art and limitations related therewith, are intended to be illustrative and not exclusive. Other limitations of the related art will become apparent to those of skill in the art upon a reading of the specification and a study of the drawings.

Brief Description of the Drawings

[0007] Exemplary embodiments are illustrated in the referenced figures of the drawings. It is intended that the embodiments and the figures disclosed herein are to be considered illustrative rather than limiting.

[0008] Figure IA is a schematic plan view of a semiconductor component having through wire interconnects (TWI);

[0009] Figure IB is a schematic side elevation view of the semiconductor component of Figure IA;

[0010] Figure 1C is an enlarged schematic cross sectional view taken along section line 1C- 1C of Figure IA illustrating a through wire interconnect (TWI) of the semiconductor component;

[0011] Figures 2A-2L are enlarged schematic cross sectional views of alternate embodiments of the through wire interconnect (TWI) shown in Figures IA- IC;

[0012] Figure 2M is an enlarged schematic plan view of an alternate embodiment of the through wire interconnects (TWI) shown in Figures IA-I C;

[0013] Figures 2N-2O are enlarged schematic cross sectional views of alternate embodiments of the through wire interconnects (TWI) shown in Figures IA- IC;

[0014] Figure 3A is a schematic side elevation view of a stacked system fabricated using two of the semiconductor components of Figures IA- 1C in a circuit side to back side orientation;

[0015] Figure 3B is a schematic side elevation view of a stacked system fabricated using two of the semiconductor components of Figures IA- 1C in a circuit side to circuit side orientation;

[0016] Figure 4A is a schematic plan view of an alternate embodiment semiconductor component having through wire interconnects (TWI) with polymer members;

[0017] Figure 4B is a schematic side elevation view of the semiconductor component of Figure 4A;

[0018] Figure 4C is an enlarged schematic cross sectional view taken along line 4C-4C of Figure 4A illustrating a through wire interconnect (TWI) of the semiconductor component of Figure 4A;

[0019] Figure 4D is an enlarged schematic cross sectional view taken along section line 4D-4D of Figure 4C illustrating an outer layer of the through wire interconnect (TWI);

[0020] Figure 4E is an enlarged schematic cross sectional view taken along section line 4E-4E of Figure 4C illustrating the outer layer of the through wire interconnect (TWI);

[0021] Figure 5 is a schematic side elevation view equivalent to Figure 4C of an alternate embodiment 2X semiconductor component encapsulated on opposing sides;

[0022] Figures 6A and 6B are schematic cross sectional views of a test system incorporating the semiconductor component of Figures 4A-4E;

[0023] Figure 7 is a schematic cross sectional view of an alternate embodiment test system incorporating the semiconductor component of Figures 4A- 4E;

[0024] Figure 8 is a schematic cross sectional view of module system incorporating the semiconductor component of Figure 5;

[0025] Figure 9A is a schematic plan view of a wafer system incorporating multiple semiconductor components of Figure 1 A-IC bonded to a semiconductor wafer;

[0026] Figure 9B is an enlarged schematic cross sectional view taken along section line 9B-9B of Figure 9A illustrating a single semiconductor component bonded to the semiconductor wafer;

[0027] Figure 10 is a schematic side elevation view of a wafer to wafer system incorporating semiconductor components having through wire interconnects (TWI);

[0028] Figures 1 IA-I ID are schematic side elevation views illustrating steps in a film assisted molding method for fabricating the semiconductor component of Figures 1A-1C;

[0029] Figure 12A is an enlarged schematic view taken along line 12A-12A of Figure HA;

[0030] Figure 12B is an enlarged schematic cross sectional view taken along line 12B-12B of Figure HB;

[0031] Figure 12C is an enlarged schematic view taken along line 12C-12C of Figure 1 ID;

[0032] Figures 13A-13B are schematic cross sectional views showing steps in a method for fabricating the alternate embodiment semiconductor component of Figures 4A-4E;

[0033] Figure 14 is a schematic side elevation view equivalent to Figure IB of an alternate embodiment semiconductor component encapsulated on six sides;

[0034] Figures 15A-15D are schematic cross sectional views showing steps in a method for fabricating the alternate embodiment semiconductor component of Figure 2K;

[0035] Figures 16A-16C are schematic views showing steps in a method for fabricating an embodiment semiconductor component using a film frame.

Detailed Description

[0036] As used herein, "semiconductor component" means an electronic element that includes a semiconductor substrate or makes contact with a semiconductor substrate. "Semiconductor substrate" means an electronic element, such as a semiconductor die, or a semiconductor package that includes integrated circuits and semiconductor devices. "Interconnect" means an electrical element which electrically connects different electrical elements and transmits signals between these elements. "Wafer-level" means a process conducted on an element, such as a semiconductor wafer, containing multiple semiconductor components or substrates. "Die level" means a process conducted on a singulated element, such as a singulated semiconductor die or package. "Chip scale" means having an outline about the same as that of a semiconductor die. "Wafer size" means having an outline about the same as that of a semiconductor wafer.

[0037] Referring to Figures IA- 1C, a semiconductor component 10 (Figure IA) is illustrated. The semiconductor component 10 (Figure IA) includes a semiconductor substrate 12 (Figure IB); a plurality of through wire interconnects 14 (Figure IB) on the semiconductor substrate 12; and a polymer layer 16 on the semiconductor substrate 12 encapsulating at least a portion of each through wire interconnect 14. The semiconductor substrate 12 (Figure I B) can comprise a conventional semiconductor die, or a thinned semiconductor die, having integrated circuits 22 (Figure 1C) constructed in a desired electrical configuration using active semiconductor devices such as transistors. For example, the semiconductor substrate 12 (Figure IB) can comprise a high speed digital logic device, such as a dynamic random access memory (DRAM), a static random access memory (SRAM), a flash memory, a microprocessor, a digital signal processor (DSP), an application specific integrated circuit (ASIC), an imager device, or a MEMS type device (e.g., accelerometer, microphone, speaker, electro mechanical device). In addition, the semiconductor substrate 12 (Figure IB) can comprise a tested die that has been certified as a known good die.

[0038] As shown in Figure IA, in the illustrative embodiment, the semiconductor substrate 12 is a generally rectangular shaped die having opposed lateral edges and opposed longitudinal edges. However, the semiconductor substrate

12 (Figure IA) can have any polygonal shape, such as square or triangular, and can also have a circular or oval shape. In addition, the semiconductor substrate 12 can comprise a full thickness semiconductor die or a thinned semiconductor die. As shown in Figure 1C, the semiconductor substrate 12 includes a circuit side 17 ("first side" in some of the claims), and a back side 18 ("second side" in some of the claims).

[0039] As also shown in Figure IA, the semiconductor substrate 12 includes a plurality of substrate contacts 20 on the circuit side 17, which in the illustrative embodiment comprise the device bond pads. Alternately, rather than being the device bond pads, the substrate contacts 20 can comprise redistribution contacts (i.e., contacts formed in conjunction with a redistribution layer (RDL)). In addition, the substrate contacts 20 can comprise a highly-conductive, wire-bondable metal, such as aluminum or copper. The substrate contacts 20 can also comprise stacks of different metals, such as aluminum-nickel-gold, aluminum-nickel-solder, copper-palladium, and aluminum on copper.

[0040] As another alternative, at least some of the substrate contacts 20 (Figure IA) can comprise special purpose contacts formed specifically for constructing the through wire interconnects 14. For example, the substrate contacts 20 can comprise electrically isolated contacts, that are not in electrical communication with the integrated circuits 22 (Figure 1C) on the semiconductor substrate 12. As will be further explained, this concept can be employed in stacked components to reduce unwanted capacitance, noise, bleed off voltage and bleed off current.

[0041] For simplicity, the semiconductor substrate 12 (Figure IA) is illustrated with only four substrate contacts 20 (Figure IA) arranged in a single row. However, in actual practice the semiconductor substrate 12 (Figure IA) can include tens of substrate contacts 20 (Figure IA) arranged in a desired configuration, such as a center array, an edge array or an area array. Also in the illustrative embodiment, the substrate contacts 20 (Figure IA) have a generally rectangular peripheral outline and angled corners. However, as with the semiconductor substrate 12 (Figure IA), the substrate contacts 20 (Figure IA) can have any polygonal shape including square, circular, triangular and oval. In addition, a size of the substrate contacts 20 (Figure 1C) can be selected as required. For example, each substrate contact 20 (Figure 1C) can have a length (L) (Figure 1C) of from about 50 μm to 200 μm and a width (W) (Figure 1C) of from about 50 μm to 200 μm. Also in Figure IA, each substrate

contact 20 has an associated through wire interconnect 14. However, the through wire interconnects 14 can also be formed on only selected substrate contacts 20. For example, only the substrate contacts 20 having a selected output or input configuration (e.g., Vss, Vcc) can be equipped with a through wire interconnect 14.

[0042] As shown in Figure 1C, the substrate contacts 20 can be in electrical communication with internal conductors 24 located within the semiconductor substrate 12 proximate to the circuit side 17. In addition, the internal conductors 24 are in electrical communication with the integrated circuits 22 in the semiconductor substrate 12. The internal conductors 24 (Figure 1C) can be part of the internal structure of the semiconductor substrate 12, and can comprise a highly conductive metal, such as aluminum or copper. Further, a die passivation layer 26 (Figure 1C) proximate to the circuit side 16 protects the internal conductors 24 (Figure 1C) and the integrated circuits 22 (Figure 1C). The die passivation layer 26 (Figure 1C) can comprise an electrically insulating material, such as BPSG (borophosphosilicate glass), a polymer or an oxide. In addition, the die passivation layer 26 (Figure 1C) includes openings 44 (Figure 1C) aligned with the substrate contacts 20 which provide access to the substrate contacts 20. AU of the elements of the semiconductor substrate 12 including the integrated circuits 22 (Figure 1C), the internal conductors 24 (Figure 1C), and the die passivation layer 26 (Figure 1C), can be formed using well known semiconductor fabrication processes.

[0043] As also shown in Figure 1C, the through wire interconnect 14 includes a via 28 through the substrate contact 20 and the semiconductor substrate 12, a wire 30 in the via 28, a bonding member 32 on the wire 30 and the substrate contact 20, and a polymer material 36 in the via 28.

[0044] The via 28 (Figure 1C) extends through the substrate contact 20, and through the full thickness of the semiconductor substrate 12, from the circuit side 17 to the back side 18 thereof. In the illustrative embodiment, the via 28 (Figure 1C) is generally circular, and has an inside diameter (ID) which is about 1.5 to 3 times larger than the outside diameter (OD) of the wire 30 (Figure 1C). By way of example, the wire 30 (Figure 1C) can have an outside diameter (OD) of about 25 μm, and the via 28 (Figure 1C) can have an inside diameter (ID) of about 37.5 μm to 75 μm. In addition, a length of the via 28 (Figure 1C) is dependent on an overall thickness T of the semiconductor substrate 12 (Figure 1C). A representative range for the thickness

T of the semiconductor substrate 12 (Figure 1C) can be from about 10 μm to 725 μm, depending on whether the semiconductor substrate 12 is a thinned or a full thickness die or wafer.

[0045] The via 28 (Figure 1C) can also include an insulating layer 34 (Figure 1C) formed on an inside diameter thereof, which electrically insulates the via 28 (Figure 1C) from the integrated circuits 22 (Figure 1C), and other electrical elements on the semiconductor substrate 12. The insulating layer 34 (Figure 1C) can comprise an electrically insulating material, such as a polymer (e.g., polyimide or parylene) or an oxide (e.g., SiO ₂ ). Alternately, the wire 30 (Figure 1C), rather than the via 28 (Figure 1C), or in addition to the via 28 (Figure 1C), can be electrically insulated.

[0046] In Figure IA, the via 28 is illustrated as being located in an upper left hand corner of the substrate contact 20. In other words, the via 28 is offset in both x and y directions from a center of the substrate contact 20. In this case, the via 28 can have an inside diameter (ID) (Figure 1C) that is about one half of the width (L) (Figure 1C) of the substrate contact 20 (Figure 1C). Alternately, the via 28 can be located anywhere on the substrate contact 20 such as in the center of the substrate contact 20. Also, rather than just one via 28, the substrate contact 20 can include multiple vias 28.

[0047] As shown in Figure 1C, the wire 30 is located along a longitudinal axis of the via 28, and extends across the entire length of the via 28. The wire 30 (Figure 1C) can be held in place in the via 28 (Figure 1C) by the polymer material 36 (Figure 1C), which fills the via 28 (Figure 1C) and surrounds the wire 30 (Figure 1C). The polymer material 36 can comprise an electrically insulating curable polymer, such as a polyimide, an epoxy or a silicone. Also, the polymer material 36 (Figure 1C) can include fillers, such as silicates, configured to reduce the coefficient of thermal expansion (CTE) and adjust the viscosity of the dielectric material. Suitable curable polymers are manufactured by Shinitsu of Japan, and Dexter Electronic Materials of Rocky Hill, CT. For some applications, the polymer material 36 can comprise an electrically conductive material, such as a nano particle conductive polymer.

[0048] As also shown in Figure 1C, the wire 30 (Figure 1C) includes a loop portion 50, and a first end 38 (Figure 1C) extending out of the via 28 (Figure 1C) and bonded to the substrate contact 20 (Figure 1C). The wire 30 (Figure 1C) also includes

a second end 40 (Figure 1C) proximate to the back side 18 (Figure 1 C) of the semiconductor substrate 12. The through wire interconnect 14 (Figure 1C) also includes a bonded connection 42 (Figure 1C) between the first end 38 (Figure 1C) of the wire 30 and the substrate contact 20. In addition, the second end 40 (Figure 1C) of the wire 30 can comprise a second contact in the form of a generally spherically shaped contact ball 46, such as a "free air ball" formed using an electronic flame off (EFO) process during the bonding process.

[0049] In the through wire interconnect 14 (Figure 1 C), the bonded connection 42 (Figure 1C) comprises a wedge bond formed using a ball bonding process, such as thermosonic or thermocompressive wire bonding. Alternately, a bonded connection can comprise a wedge bond formed using ultrasonic wire bonding. As another alternative, the wire 30 can comprise a bonding ribbon, and a bonded connection can comprise a ribbon wire bond. As another alternative, the wire 30 can comprise a compressed wire, and a bonded connection can be in the form of a stud bump and a compression flange on the compressed wire.

[0050] US patent application serial no. 11/296,057 filed on 12/07/2005, entitled "Semiconductor Components having Through Wire Interconnects (TWI), And Methods And Systems For Fabricating Semiconductor Components", which is incorporated herein by reference, describes method and systems for fabricating semiconductor components with through wire interconnects. US patent application serial no. 11/102,408 filed on 04/08/2005 entitled "Method And System For Fabricating Semiconductor Components With Through Wire Interconnects", which is also incorporated herein by reference, also describes methods and systems for fabricating semiconductor components with through wire interconnects.

[0051] A representative outside diameter (OD) (Figure 1C) of the wire 30 can be from about 12 μm to about 150 μm. In addition, the wire 30 (Figure 1C) can comprise a conventional wire material used in semiconductor packaging, such as solder alloys, gold, gold alloys, copper, copper alloys, silver, silver alloys, aluminum, aluminum-silicon alloys, and aluminum-magnesium alloys. In addition, the wire 30 (Figure 1C) can comprise a metal, or a metal alloy, that does not contain reductions of hazardous substances (ROHS), such as lead. Exemplary ROHS free metals include lead free solders, such as 97.5%Sn2.5%Ag. Other ROHS free metals include gold, copper and alloys of these metals such as copper coated with a layer of flash gold.

Also, the melting point of the wire 30 (Figure 1C) should preferably be greater than that of the substrate contact 20. Further, the wire 30 can comprise an insulated bonding wire having an electrically insulating outer layer, such as a polymer. The insulating layer on the wire 30 can take the place of the insulating layers 34 (Figure 1C). This type of insulated bonding wire is available from Micro Bond of Canada.

[0052] As also shown in Figure IA, in the through wire interconnect 14, the bonding member 32 is located next to the via 28, and is bonded to the substrate contact 20 in a right, lower quadrant of the substrate contact 20. Alternately, the bonding member 32 (Figure 1C) can be centered on the substrate contact 20 (Figure 1C) and on the via 28 (Figure 1C), or located on any portion of the substrate contact 20 (Figure 1C) or the via 28 (Figure 1C).

[0053] The bonding member 32 (Figure 1C) bonds the first end 38 of the wire 30 (Figure 1C) to the substrate contact 20 (Figure 1C). In addition, the bonding member 32 (Figure 1C) functions as a first contact for the through wire interconnect, as a securing and supporting structure for the wire 30 (Figure 1C), and as a bonding structure for bonding the through wire interconnect 14 (Figure 1C) to an external electrical element, such as contacts on a support substrate, or another through wire interconnect on another semiconductor component. The bonding member 32 (Figure 1C) preferably comprises a non oxidizing, bondable material such as gold or platinum, or an easily reflowable material, such as solder.

[0054] In the illustrative embodiment, the bonding member 32 (Figure 1C) comprises a stud bump, or a ball bump, bonded to the substrate contact 20. In this case, the bonding member 32 (Figure 1C) can be formed using a wire bonder, a stud bumper, or a ball bumper. Alternately, the bonding member 32 (Figure 1C) can comprise a solder bump, a welded connection, or a conductive polymer connection. In Figure 1C, the bonding member 32 has a diameter which is less than the length (L) and the width (W) of the substrate contact 20 (e.g., 25% to 75%), such that it covers only a portion of the substrate contact 20, and does not cover the via 28. However, a bonding member can also be configured to substantially cover the substrate contact 20 and the via 28.

[0055] As shown in Figure IB, the polymer layer 16 substantially covers the circuit side 17 of the substrate 12, and has a peripheral outline matching that of the substrate 12. Alternately, the polymer layer 16 can cover only selected portions of the

circuit side 17 of the substrate 12, such as only the areas surrounding the substrate contacts 20. As shown in Figure 1C, the polymer layer 16 encapsulates the substrate contacts 20 and loop portions 50 of the wires 30 of the through wire interconnects 14. The polymer layer 16 also substantially encapsulates the bonding member 32. However, a tip portion 48 of the bonding member 32 remains unencapsulated by the polymer layer 16, and forms a first contact for the through wire interconnect 14 proximate to the circuit side 17.

[0056] The polymer layer 16 (Figure 1C) can comprise a curable polymer material such as silicone, polyimide, epoxy parylene or a molding compound. In addition, these materials can include fillers, such as silicates, configured to reduce the coefficient of thermal expansion (CTE), and adjust the viscosity of the polymer material. One suitable curable polymer material is manufactured by Dexter Electronic Materials of Rocky Hill, CT under the trademark "HYSOL" FP4450. One suitable molding compound is manufactured by JSR Micro of North America under the product designation JSR WPR-S 17OP. Other molding compounds particularly suited for the film assisted molding process to be hereinafter described are manufactured by Shin-Etsu Chemical Co. Ltd. of Japan.

[0057] The polymer layer 16 (Figure 1C) has a planar surface which facilitates stacking of the semiconductor component 10 (Figure IA) to another component, or to a next level substrate. In addition, the polymer layer 16 (Figure 1C) encapsulates the wire 30 (Figure 1C), the loop portion 50 (Figure 1C) of the wire 30 (Figure 1C), and the bonding member 32 (Figure 1C).

[0058] Referring to Figures 2A-2O, alternate embodiment through wire interconnects 14-1 to 14-15 are illustrated. The through wire interconnects 14-1 to 14-15 are all substantially similar to the through wire interconnect 14 (Figures IA- IC).

[0059] In Figure 2A, a through wire interconnect 14-1 includes a wire 30-1 encapsulated by a polymer material 36-1, and a second contact 46-1 in the form of a planar end of the wire 30-1. In addition, the polymer material 36-1 and the second contact 46-1 have a same planar surface.

[0060] In Figure 2B, a through wire interconnect 14-2 includes a wire 30-2 encapsulated by a polymer material 36-2, and a second contact 46-2 in the form of a stud bump or a ball bump on the wire 30-2 and the polymer material 36-2.

[0061] In Figure 2C, a through wire interconnect 14-3 includes a wire 30-3 encapsulated by a polymer material 36-3, and a second contact 46-3 in the form of a metal bump, such as solder, gold, or nickel on the end of the wire 30-1. In this embodiment the second contact 46-3 can comprise a meniscus solder coated end. Alternately, with the wire 30-3 comprising gold, the second contact 46-3 can comprise nickel plated with a solder bump or ball.

[0062] In Figure 2D, a through wire interconnect 14-4 includes a wire 30-4 encapsulated by a polymer material 36-3 that is etched back to expose a second contact 46-4 on the wire 30-4.

[0063] In Figure 2E, a through wire interconnect 14-5 includes a wire 30-5 encapsulated by a polymer material 36-5, and a second contact 46-5 in the form of a planar metal pad on the wire 30-5 and the polymer material 36-5.

[0064] In Figure 2F, a through wire interconnect 14-6 includes a wire 30-6 encapsulated by a polymer material 36-6. In addition, a substrate 12-6 is etched back to expose the polymer material 36-6. Further, a second contact 46-6 comprises a planar end of the wire 30-6 and the polymer material 36-6 have a same planar surface.

[0065] In Figure 2G, a through wire interconnect 14-7 includes a wire 30-7 encapsulated by a polymer material 36-7. In addition, both the polymer material 36-7 and a back side of a substrate 12-7 are etched back to expose a second contact 46-7 which comprises an end of the wire 30-7.

[0066] In Figure 2H, a through wire interconnect 14-8 includes a wire 30-8 encapsulated by a polymer material 36-8. However, the polymer material 36-8 also encapsulates the circuit side of the substrate 12-8. In this embodiment, the polymer material 36-8 takes the place of both the polymer layer 16 (Figure 1C) and the polymer material 36 (Figure 1C). As will be further explained, the polymer material 36-8 can be formed using a film assisted molding process. The through wire interconnect 14-8 also includes a second contact 46-8 which comprises a planar end of the wire 30-8, which is co-planar to the polymer material 36-8.

[0067] In Figure 21, a through wire interconnect 14-9 includes a wire 30-9 encapsulated by a polymer material 36-9. As with the previous embodiment, the polymer material 36-9 also encapsulates the circuit side of the substrate 12-9. The through wire interconnect 14-9 also includes a second contact 46-9 which comprises an end of the wire 30-9 projecting from a surface of the polymer material 36-9.

[0068] In Figure 2 J, a through wire interconnect 14-10 includes a wire 30-10 encapsulated by a polymer material 36-10. As with the previous embodiment, the polymer material 36-10 also encapsulates the circuit side of the substrate 12-10. The through wire interconnect 14-10 also includes a back side polymer layer 16-10, and a second contact 46-10 which comprises a planar end of the wire 30-10 co-planar to the back side polymer layer 16-10.

[0069] In Figure 2K, a through wire interconnect 14-11 includes a wire 30-11 bonded to a tip portion of a bonding member 32-11. In this embodiment, a bonded connection 42-11 is formed between the wire 30-11, and the tip portion of the bonding member 32-11. For example, the bonding member 32-11 can comprise a stud bump bonded to the substrate contact 20-11 , and the bonded connection 42-11 can comprise a ball bond formed on the stud bump. Alternately, the bonded connection 42-11 can be formed anywhere on the bonding member 32-11 such as in the center, or on an exterior surface thereof. A polymer layer 16-11 substantially encapsulates the through wire interconnect 14-11 , but leaves the bonded connection 42-11 and the tip portion of the bonding member 32-11 exposed as a first contact for the through wire interconnect 14-11. In addition, the polymer layer 16-11 also fills the via 28-1 1 and secures the wire 30-11 therein, substantially as previously described for polymer material 36 (Figure 1C). The polymer layer 16-11 can be formed using a film assisted molding process to be hereinafter described.

[0070] In Figure 2L, a through wire interconnect 14-12 includes a bonding member 32-12 in the form of a double bump. In this embodiment, a bonded connection 42-12 comprises a wire 30-12 within the bonding member 32-12 sandwiched between the double bumps. Alternately, the bonded connection 42-12 can be formed between the lowermost bump of the bonding member 32-12 and the substrate contact 20-12. US Patent Nos. 5,496,775 and 6,717,245, both of which are incorporated herein by reference, disclose double bump structures and techniques. A polymer layer 16-12 substantially encapsulates the through wire interconnect 14-12, but leaves a portion of the bonding member 32-12 exposed as a first contact for the through wire interconnect 14-12. In addition, the polymer layer 16-12 also fills the via 28-12 and secures the wire 30-12 therein, substantially as previously described for polymer material 36 (Figure 1C). The polymer layer 16-12 can be formed using a film assisted molding process to be hereinafter described.

[0071] In Figure 2M, through wire interconnects 14-13 include redistribution conductors 31-13 and pads 33-13 in electrical communication with the substrate contacts 20-13. The pads 33-13 can comprise test pads, wire bonding pads, outer lead bond OLB pads, or extended rdl pads. In addition, the through wire interconnects 14- 13 include a polymer layer 16-13, which has been cut away to show the redistribution conductors 31-13 and pads 33-13. The polymer layer 16-13 also includes windows or openings which provide access to the pads 33-13. The pads 33-13 permit temporary electrical connections to be made for performing test procedures, such as functional, parametric and burn-in testing. For example, the integrated circuits 22 (Figure 1C) on the semiconductor substrate 12 (Figure 1C) can be tested or "probed" prior to fabrication or partially fabrication of the through wire interconnects 16-13. The redistribution conductors 31-13 and the pads 33-13 can have any desired pattern, and can connect multiple through wire interconnects 14-13 together substantially as shown in Figure 2M. As also shown in Figure 2M, some of the through wire interconnects 14-13 do not include an associated pad 33-13.

[0072] In Figure 2N, a through wire interconnect 14-14 includes a bonded connection 42-14 in the form of a wedge bond formed between the wire 30-14 and the substrate contact 20-14 using an ultra sonic or wedge bonding process. Alternately, the bonded connection 42-14 can comprise a ball bond formed using a thermosonic or thermocompression bond. In addition, there is no bonding member 32 (Figure 1C) on the bonded connection 42-14. A polymer layer 16-14 encapsulates the through wire interconnect 14-14, while leaving a tip portion 35-14 of the wire 30-14 exposed as a first contact for the through wire interconnect 14-14. The polymer layer 16-14 also fills the via 28-14 and secures the wire 30-14 therein, substantially as previously described for polymer material 36 (Figure 1C). As will be further explained, the tip portion 35-14 can also include a wear resistant or penetration enhancing layer. In addition, the polymer layer 16-14 can be formed using a film assisted molding process to be hereinafter described.

[0073] In Figure 2O, a through wire interconnect 14-15 is substantially similar to the through wire interconnect 14-14 (Figure 2N). However, the through wire interconnect 14-15 also includes a projection 37-15, such as a metal pin, a ball bump or a stud bump, on the tip portion of the wire 30-15. In this embodiment, the projection 37-15 functions as a first contact for the through wire interconnect 14-15.

[0074] Referring to Figure 3 A, a stacked system 54 includes two semiconductor components 10 stacked in a circuit side 17 to back side 18 configuration. In addition, the ball contact 46 on the upper semiconductor component 10 is bonded to the bonding member 32 on the lower semiconductor component 10 using a suitable bonding process such as a gold to gold diffusion bond, a reflow bond, or a conductive polymer bond, such as an anisotropic conductive film (ACF) to be hereinafter described. In the stacked system 54, the polymer layer 16 on the lower semiconductor component 10 provides a planar surface for stacking. In addition, either the ball contacts 46 on the lower semiconductor component 10, or the bonding members 32 on the upper semiconductor component 10, can be configured as terminal contacts for the stacked system 54. Alternately, separate terminal contacts, such as solder balls, can be formed on the semiconductor components 10 in electrical communication with the ball contacts 46 or the bonding members 32. Previously incorporated application serial no. 11/296,057 discloses methods for forming terminal contacts.

[0075] Referring to Figure 3 B, a stacked system 56 includes two semiconductor components 10 stacked in a circuit side 17 to circuit side 17 configuration. In addition, the bonding members 32 on the components 10 are bonded to one another using a suitable bonding process such as a gold to gold diffusion bond, a reflow bond, or a conductive polymer bond such as an anisotropic conductive film (ACF) to be hereinafter described. In the stacked system 56, the polymer layers 16 on both components 10 provide planar surfaces for stacking. In addition, the ball contacts 46 can be configured as terminal contacts for the stacked system 56. Alternately, separate terminal contacts such as solder balls can be formed on the semiconductor components 10 in electrical communication with the ball contacts 46. Previously incorporated application serial no. 11/296,057 discloses additional semiconductor components and stacked systems that can be fabricated using semiconductor components with through wire interconnects.

[0076] Referring to Figures 4A-4E, an alternate embodiment semiconductor component 1OA is illustrated. The semiconductor component 1OA includes a substrate 12A having a plurality of substrate contacts 2OA and through wire interconnects 14 A. Each through wire interconnect 14A includes a via 28 A, a wire 3OA having a loop portion 50A, and a bonding member 32A bonding the wire 30A to

the substrate contact 2OA, substantially as previously described for through wire interconnects 14 (Figure IA). In this embodiment the wire 30A and the contact ball 46A (second contact) on the wire 30A are free to move in the z direction as indicated by arrow 62A (Figure 4C).

[0077] The through wire interconnects 14A (Figure 4C) also include polymer members 58 A (Figure 4C) on the substrate contacts 2OA (Figure 4C) ₅ which support the loop portions 5OA (Figure 4C) of the wires 3OA (Figure 4C). The polymer members 58A (Figure 4C) can have a compliant, resilient or compressible configuration. In addition, the loop portions 50A (Figure 4C) of the wires 30A (Figure 4C) can be embedded in the polymer members 58 A (Figure 4C) or supported by grooves or other features on the polymer members 58A (Figure 4C). Alternately, the polymer members 58 A (Figure 4C) can have a relatively rigid configuration with the wires 3OA (Figure 4C) supported by the surfaces thereof. In either case, the polymer members 58A (Figure 4C) protect, and maintain the planarity and the shapes of the loop portions 50A (Figure 4C) of the wires 30A (Figure 4C). The polymer members 58A (Figure 4C) also allow the tips of the loop portions 50A (Figure 4C) to be used as contacts for the through wire interconnects 14A (i.e., first contacts as previously described, or in some cases third contacts in combination with the first contacts and the second contacts). In this case, the loop portions 5OA (Figure 4C) can have a first height Hl (Figure 4C) on the substrate 12 A, which is greater than a second height H2 (Figure 4C) of the bonding members 32A (Figure 4C) on the substrate 12 A.

[0078] The polymer members 58A (Figure 4C) can also be configured to provide a spring force which allows the contact balls 46A (Figure 4C) to flex in the z- direction during electrical engagement of a test contact 64 (Figure 6A) on a device under test 66 (Figure 6A). The device under test 66 (Figure 6A) can comprise a semiconductor die or wafer, or an array of semiconductor dice on a semiconductor wafer or portion thereof. The polymer member 58 A (Figure 4C) also allow the tips of the loop portions 50A (Figure 4C) of the wires 30A (Figure 4C) to flex during electrical engagement of mating contacts. The sidewalls of the vias 28 A (Figure 4C) can also be covered with a low friction insulating layer 34A (Figure 4C), such as parylene, which allows the wires 3OA to move freely within the vias 28A (Figure 4C) during electrical engagement. The wires 30A can also include polymer layers such as

the previously described insulated bonding wire from Micro Bond of Canada. In this case the polymer layers on the wires 3OA (Figure 4C) can help lower friction between the wires 30A (Figure 4C), and the vias 28A (Figure 4C). In addition, the wires 30A (Figure 4C) can be long enough to space the contact balls 46A (Figure 4C) from the substrate 12A (Figure 4C) to allow movement during electrical engagement.

[0079] The polymer members 58A (Figure 4C) can comprise a polymer material such as silicone, polyimide, epoxy or mold compound having a selected size, shape and durometer. In addition, the polymer members 58A (Figure 4C) can be formed with required sizes and shapes using a molding process, a deposition process, or a screen printing process. In the illustrative embodiment, each through wire interconnect 14A (Figure 4C) has an associated polymer member 58A (Figure 4C). However, a polymer member can be formed to support several through wire interconnects 14 A, such as all of the through wire interconnects 14A on a row of substrate contacts 2OA (Figure 4C). Also in the illustrative embodiment, the polymer members 58A (Figure 4A) are tapered to conform to the natural shape of the wire loops 50A (Figure 4C). However, the polymer members 58A (Figure 4A) can have any desired shape. The polymer members 58A (Figure 4A) can also have any desired footprint such as a circular or polygonal, and any desired height. In addition, the polymer members 58A can include grooves, ridges, indentations or other features, which support the loop portions 5OA of the wires 30A. As another alternative the polymer members 58 A can at least partially encapsulate or surround the wire loops 50A (Figure 4C)

[0080] As shown in Figures 4D and 4E, the contact balls 46 A, and the tips of the loop portions 5OA as well, can include wear resistant outer layers 6OA, which coat the surfaces of the wires 30A (Figure 4C). For example, the wires 30A (Figure 4C) can comprise gold, and the outer layers 6OA (Figures 4D and 4E) can comprise nickel, tungsten or a conductive polymer having metal particles therein. In addition to providing wear resistant surfaces, the outer layers 6OA can also enhance oxide and contaminant penetration for making low resistance, temporary or permanent electrical connections.

[0081] Referring to Figure 5, an alternate embodiment 2X semiconductor component 1OB includes through wire interconnects 14B constructed substantially as previously described for the semiconductor component 1OA (Figure 4C). As such,

the semiconductor component 1OB includes polymer members 58B which support loop portions 50B of the through wire interconnects 14B. The semiconductor component 1OB also includes a first polymer layer 16B-1, which encapsulates the circuit side 17B of the semiconductor substrate 12B and substantially encapsulates the loop portions 5OB of the through wire interconnects 14B. The first polymer layer 16B-1 also fills the via 28B and secures the wire 30B in the vias 28B, substantially as previously described with the polymer material 36 (Figure 1C). However, surfaces of the loop portions 50B of the through wire interconnects 14B remain exposed, and function as contacts (first contacts) for the through wire interconnects 14B proximate to the circuit side 17B. As with the previous embodiment, these contacts can be coated with a wear resistant or oxide penetrating material such as nickel, or a conductive polymer having metal particles. The semiconductor component 1OB also includes a second polymer layer 16B-2, which encapsulates the back side 18B of the semiconductor substrate 12B, and substantially encapsulates the ball contacts 46B of the through wire interconnects 14B. However, surfaces of the ball contacts 46B can remain exposed, to function as contacts (second contacts) for the through wire interconnects 14B proximate to the back side 18B.

[0082] Referring to Figures 6A and 6B, a test system 68 incorporating the semiconductor component 1OA is illustrated. In the test system 68, the semiconductor component 1OA functions as an interconnect component for making temporary electrical connections with a device under test 66. For example, the device under test 66 can comprise a semiconductor wafer, in which case the semiconductor component 1OA would perform the same function as a probe card. Alternately, the device under test 66 can comprise a singulated semiconductor die or semiconductor package. In this case the semiconductor component 1OA can be contained in a test fixture, substantially as described in US Patent No. 5,519,332 entitled "Carrier For Testing An Unpackaged Semiconductor Die", which is incorporated herein by reference.

[0083] As shown in Figure 6A, the device under test 66 includes a plurality of test contacts 64 that are initially aligned with the ball contacts 46A of the through wire interconnects 14 A. Alignment can be accomplished using optical or mechanical alignment techniques that are known in the art. As also shown in Figure 6A, the through wire interconnects 14A are placed in electrical communication with test circuitry 70, which is configured to apply test signals to the device under test 66.

Previously incorporated application serial no. 11/296,057 discloses various methods and structures for placing the through wire interconnects 14A into electrical communication with the test circuitry 70.

[0084] As shown in Figure 6B, following alignment, either the semiconductor component 1OA, or the device under test 66, (or both) can be moved in the z-direction to place the ball contacts 46A of the through wire interconnects 14A into contact with the test contacts 64. In addition, the semiconductor component 1OA and the device under test 66 can be held together using a biasing force generated by a test fixture, a wafer prober or other testing device known in the art. This establishes temporary electrical communication between the ball contacts 46A of the through wire interconnects 14A and the test contacts 64. As the wire 30A is free to move in the z-direction during electrical engagement, variations in the planarity and location of the test contacts 64 can be accommodated by movement of the ball contacts 46A. In addition, the polymer members 58 A provide spring forces for biasing the ball contacts 46A against the test contacts 64 and for returning the ball contacts 46A to their original locations following the test process. This allows the ball contacts 46A to be used to align with and test another device under test 66. Further, the outer layers 6OA (Figure 4D) on the ball contacts 46 A penetrate oxide layers on the test contacts 64 to provide low resistance temporary electrical connections.

[0085] Referring to Figure 7, an alternate embodiment test system 72 incorporating the semiconductor component 1OA is illustrated. In the test system 72, the semiconductor component 1OA functions as an interconnect component for making temporary electrical connections with a device under test 66 substantially as previously described for the test system 68 (Figure 6A). However, in the test system 72 the loop portions 50A of the wires 30A, rather than the ball contacts 46A, make the temporary electrical connections with the test contact 64 on the device under test 66. In addition, the polymer members 58A provide spring forces for maintaining the location and planarity of the loop portions 50A. The polymer members 58 A also provide spring forces for biasing the loop portions 5OA into the test contact 64 under a biasing force generated by a test fixture, a wafer prober or other testing device known in the art. Essentially the same test system 72 (Figure 7) can be constructed using the semiconductor component 1OB (Figure 5) in place of the semiconductor component 1OA (Figure 7). In this case, the polymer layer 16B-I ^* (Figure 5) can be relatively

compressible to allow movement of the loop portions 50A during electrical engagement.

[0086] Referring to Figure 8, an alternate embodiment module system 74 incorporating two semiconductor components 1OU, 1OL having through wire interconnects 14B is illustrated. The semiconductor components 1OU, 1OL are substantially similar to the semiconductor component 1OB of Figure 5. Although only two semiconductor components 1OU, 1OL are illustrated, it is to be understood that the module system 74 can include any number of stacked semiconductor components (e.g., two to twenty). The claims to follow thus refer to at least two stacked semiconductor components. In addition, the semiconductor components 1OU, 1OL are attached and interconnected using an anisotropic conductive film 41 which covers the back side of the lower semiconductor component 1OL, and the circuit side of the upper semiconductor component 1OU. However, the semiconductor components 1OU, 1OL can be attached and interconnected using an adhesive bond and a conductive bond between mating elements.

[0087] The module system 74 (Figure 8) includes a module substrate 78, such as a circuit board, having a plurality of electrodes 80, which connect to other electrical elements and circuits on the module substrate 78. In addition, the loop portions 5OB of the through wire interconnects 14B on the lower semiconductor component 1OL are bonded to the electrodes 80 on. the support substrate 78 using a bonded connection as previously described. The loop portions 50B of the through wire interconnects 14B .on the lower semiconductor component 1 OL can be bonded to the electrodes 80 on the module substrate 78 using bonded connections such as solder fillets, conductive adhesive layers, reflow bonds, or diffusion bonds. As previously described, the loop portions 5OB are supported by the polymer members 58B, which maintain their locations and planarity. As shown in Figure 8, the polymer layer 16B on the lower semiconductor component 1OL also spaces and electrically insulates the lower semiconductor component 1OL from the module substrate 78. Alternately, these electrical connections can be made using an anisotropic conductive film 41B placed between the polymer layer 16B on the lower semiconductor component 1OL and the substrate 78.

[0088] As shown in Figure 8, the module system 74 also includes the anisotropic conductive film 41 which electrically connects the loop portions 5OB of

the through wire interconnects 14B on the upper semiconductor component 1OU with the through wire interconnects 14B on the lower semiconductor component 1 OL. In the illustrative embodiment, the ball contacts 46B of the through wire interconnects 14B on the lower semiconductor component 1OL have been eliminated, such that electrical contact is through the anisotropic conductive film 41 to the ends of the wires 30B of the through wire interconnects 14B on the lower semiconductor component 1OL. The anisotropic conductive film 41 and the anisotropic conductive film 41B can comprise a thermally and electrically conductive Z-axis film adhesive. On suitable Z-axis film adhesive is manufactured by Btechcorp of Brentwood, TN under the product description IOB-3.

[0089] As also shown in Figure 8, the polymer layer 16B on the upper semiconductor component 1OU contacts the anisotropic conductive film 41. Further, the polymer members 58B on the upper semiconductor component 1 OU support the loop portions 50B and their points of contact with the anisotropic conductive film 41. In addition, the ball contacts 46B of the through wire interconnects 14B on the upper semiconductor component 1OU provide terminal contacts from the outside to the module system 74. Further, the polymer layer 16B-2 on the back side of the upper semiconductor component 1OU provides electrical insulation for the upper semiconductor component 1OU.

[0090] Referring to Figures 9A-9B, a wafer system 76 includes a semiconductor wafer 82 and multiple singulated semiconductor components 10 (Figures IA-C) bonded to the semiconductor wafer 82. Alternately, in place of the semiconductor components 10, the wafer system 76 can include any other previously described alternate embodiment semiconductor component. The semiconductor wafer 82 includes a plurality of semiconductor dice 84 with a desired electrical configuration having die contacts 86 (Figure 9B) in electrical communication with the integrated circuits contained on the semiconductor dice 84. For illustrative purposes the semiconductor dice 84 are illustrated as having peripheral outlines (footprints) that are about the same size but slightly larger than the peripheral outlines (footprints) of the semiconductor components 10.

[0091] As shown in Figure 9B, the bonding members 32 of the through wire interconnects 14 on the semiconductor components 10 are bonded to the die contacts 86 on the semiconductor dice 84 contained on the semiconductor wafer 82. In

addition, the polymer layers 16 on the semiconductor components 10 provide planar surfaces, which electrically insulate the components 10 from the semiconductor dice 84. In addition, adhesive layers 88 can be used to attach the semiconductor components 10 to the semiconductor wafer 82. If desired the adhesive layers 88 can comprise a conductive adhesive, such as the previously described Z-axis film adhesives to provide electrical conductivity as well as mechanical attachment. Further, the ball contacts 46 on the semiconductor components 10 provide outside electrical connection points (second contacts) to the semiconductor components 10 and the corresponding semiconductor dice 84 on the semiconductor wafer 82. Alternately, the semiconductor components 10 can be flipped and the ball contacts 46 bonded to the die contacts 86 on the semiconductor dice 84. In this case, the bonding members 32 would be on outside, and could provide outside electrical connection points (second contacts). As another alternative, the loop portions 50A (Figure 4B) or 5OB (Figure 5) of semiconductor components 1OA (Figure 4B) or 1OB (Figure 5) could be bonded to the die contacts 86 (Figure 9B) substantially as shown in Figure 8.

[0092] Referring to Figure 10, a wafer to wafer system 90 is substantially similar to the wafer system 76 (Figures 9A-9B) but the semiconductor components 10 are contained on a second semiconductor wafer 92. Alternately, in place of the semiconductor components 10, the wafer to wafer system 90 can include any of the previously described alternate embodiment semiconductor components contained on the second semiconductor wafer 92.

[0093] Referring to Figures 1 IA-I ID and 12A-12C, a method for fabricating the semiconductor component 10 (Figure IA) is illustrated. Essentially the same method can be used to fabricate any of the previously described alternate embodiments of the semiconductor component 10. In the illustrative embodiment, the method comprises a wafer level fabrication method. However, it is to be understood that the method can also be performed on singulated components with a die level fabrication method.

[0094] Initially, as shown in Figures 11A and 12 A, a component substrate 94 containing a plurality of the semiconductor substrates 12 is provided. The component substrate 94 can comprise a semiconductor wafer or a portion of a wafer containing semiconductor dice. Alternately the component substrate 94 can comprise a panel containing semiconductor packages, such as molded array packages. In addition, the

component substrate 94 can have a desired thickness, such as the previously described thickness T (Figure 1C) for the semiconductor substrates 12.

[0095] As shown in Figure 1 IA, a plurality of through wire interconnects 14 are formed on the semiconductor substrates 12 contained on the component substrate 94. Previously incorporated US application serial nos. 11/102,408 and 11/296,057 describe methods and systems for fabricating the through wire interconnects 14. Each through wire interconnect 14 includes the via 28 through the substrate contact 20 and the semiconductor substrate 12, the wire 30 in the via 28 bonded to the substrate contact 20, and the ball contact 46 (second contact) on the wire 30. Each through wire interconnect 14 also includes the bonding member 32 (second contact) on the substrate contact 20 and the wire 30 having the tip portion 48 forming a first contact substantially as previously described. Alternately, in place of the through wire interconnects 14, any of the previously described alternate embodiment of through wire interconnects can be fabricated on the semiconductor substrates 12 contained on the component substrate 94.

[0096] Each through wire interconnect 14 can also include the polymer material 36 (Figure 11 A) in the via 28 substantially as previously described. The polymer material 36 can be deposited into the via 28 and around the wire 30 in viscous form and then cured to harden. In addition, excess polymer material, such as material on the circuit side 17 of the semiconductor substrate 12 could then be removed using a spacer etch process with a suitable etchant. Alternately, the polymer material 36 can be deposited into the via 28 in viscous form prior to placement of the wire 30. Tn this case, the wire 30 would be pushed into the viscous polymer material 36, which would then be cured to harden around the wire 30. This would eliminate the need for a spacer etch to remove excess material. In addition, the via could initially be a non vented counterbore to prevent the egress of liquids or slurries during a subsequent back side thinning step, as described in previously incorporated US application serial nos. 11/102,408 and 11/296,057. The polymer material 36 (Figure 1 IA) can be deposited using a suitable deposition process such as screen printing, stenciling or deposition using a nozzle or a material dispensing system.

[0097] The polymer material 36 (Figure 11 A) can comprise an electrically insulating curable polymer, such as a polyimide, epoxy, a silicone or a mold compound. Also, the polymer material 36 can include fillers, such as silicates,

configured to reduce the coefficient of thermal expansion (CTE) and adjust the viscosity of the dielectric material. Suitable curable polymers are manufactured by Shinitsu of Japan, and Dexter Electronic Materials of Rocky Hill, CT. Following curing, the polymer material 36 provides a potting structure which secures and electrically insulates the wire 30 in the via 28. Alternately, for some applications, the polymer material 36 in the via 28 can comprise an electrically conductive material.

[0098] Next, as shown in Figure 1 IB, a film assisted molding system 96 is provided. Suitable film assisted molding systems are available from Boschman Technologies b.v. Nieuwgraaf, The Netherlands, and by Yamada of Japan. The film assisted molding system 96 allows ultra thin semiconductor components to be encapsulated on one or more surfaces. The film assisted molding system 96 includes a first mold 98 for supporting the circuit sides 17 of the semiconductor substrates 12 on the component substrate 94, and a second mold 100 for supporting the back sides 18 of the semiconductor substrates 12 on the component substrate 94. The first mold 98 includes a plurality of mold cavities 102 configured to mold the polymer layer 16 (Figure IB) on the semiconductor substrates 12. In the illustrative embodiment, the components 10 (Figure HD) are molded separately, which is referred to as a matrix substrate configuration. Alternately, multiple components can be molded together, which is referred to as an array substrate configuration.

[0099] As shown in Figures 1 IB and 12B, the first mold 98 includes a mold film 104 which follows the contour of the mold cavities 102. The first mold 98, the mold film 104 and the mold cavities 102 are sized and shaped such that the tip portions 48 of the bonding members 32 become embedded in the mold film 104 and protected from the subsequent molding step. These elements are also configured to form the polymer layers 16 (Figure HD) with a selected thickness. A representative range for the selected thickness can be from 10 μm to 500 μra.

[0100] Next, as shown in Figure 11C, a molding step is performed in which a plastic molding material, such as a thermoset polymer, is injected into the mold cavities 102 to form the polymer layers 16 on the circuit sides 17 of the semiconductor substrates 12. However, during the molding step, the tip portions 48 of the bonding members 32 are protected by the mold film 104 from the plastic molding material.

[0101] As shown in Figures 1 ID and 12C, the polymer layers 16 encapsulate the circuit sides 17 of the semiconductor substrates 12. The polymer layers 16 can be made with planar surfaces and precise thicknesses. Similarly, the tip portions 48 of the bonding members 32 can project from the polymer layers 16 by a selected distance. A representative range for this selected distance can be from 10 μm to 75 μm. As only one side of each semiconductor substrate 12 is encapsulated, the semiconductor components 10 are referred to as having a IX configuration. However, essentially the same molding process can be used to form a 2X or a 6X component. For example, essentially the same molding process can be used to encapsulate the edges and back sides 18 of the semiconductor substrates 12, while leaving tip portions of the ball contacts 46 (Figure 1 ID) exposed. As will be further explained, essentially the same molding process can also be used to form both the polymer layers 16 for encapsulation, and the polymer material 36 (Figure 1C) in the vias 28 (Figure 1C).

[0102] Essentially the same molding process can also be used to have selected areas on the component substrate 94, or on the individual semiconductor substrates 12, unencapsulated by the polymer layers 16. For example, the pixel array of an imager component can remain unencapsulated. In this case, the molding film 104 can be configured to cover or "gasket off' the pixel arrays, or other selected areas of the semiconductor substrates 12, from being encapsulated by the mold compound. As another alternative, "blocks" or "pedestals" of a compressible polymer, such as silicone, can be placed in a selected pattern on the molding film 104, or on the component substrate 94. During the molding step, the "blocks" or "pedestals" would be compressed between the component substrate 94 and the molding film 104. Where the "blocks" or "pedestals" are in intimate contact with an area or an element {e.g., loop portions 50A-Figure 4B) on the component substrate 94, the area or element would be free of the plastic molding material. The "blocks" or "pedestals" could then be removed after the molding step. Alternately, the "blocks" or "pedestals" could be left attached to the component substrate 94, and used to attach lenses over the pixel arrays of imager components.

[0103] Following the molding step, a singulating step, such as sawing, scribing, liquid jetting, or laser cutting through a liquid, can be performed to singulate the semiconductor components 10 from the component substrate 94 with desired

footprints, such as chip scale outlines. Alternately, a wafer sized component can be provided which contains multiple unsingulated semiconductor substrates 12.

[0104] Referring to Figures 13A-13B, a method for fabricating the semiconductor component 1 OA (Figure 4B) with through wire interconnects 14A (Figure 4B) having polymer members 58A (Figure 4B) is illustrated. Initially, as shown in Figure 13 A, the via 28A and the insulating layer 34 A are formed in the substrate contact 2OA substantially as described in previously incorporated US application serial nos. 11/102,408 and 11/296,057. As also described in these applications, the via 28A is initially a counterbore or blind hole having a vent opening 108. Following a wire bonding step, the back side 18A of the substrate is thinned to expose the ball contact 46 A (Figure 13B).

[0105] As also shown in Figure 13A, the polymer members 58A can be formed on the substrate contacts 2OA. The polymer members 58 A can comprise a polymer material such as silicone, polyimide, epoxy or mold compound. In addition, the polymer members 58A can have a desired size, shape and durometer. Further, the polymer members 58 A can be fabricated using a suitable process, such as depositing, molding or screen printing a viscous or semi viscous (B-stage) curable polymer onto the substrate contacts 2OA, and if desired other portions of the circuit side 17A of the semiconductor substrate 12 A. The polymer members 58 A can also be formed by placing pre-formed adhesive polymer elements on the substrate contacts 28A.

[0106] Next, as shown in Figure 13B, a wire bonder having a bonding capillary 110 can be provided. Preferably the wire bonder is configured to perform an ultra fine pitch (e.g., < 65μm) wire bonding process. Suitable wire bonders are manufactured by Kulicke & Soffa Industries Inc. of Willow Grove, PA, and Palomar of Carlsbad, CA. One suitable wire bonder is an "AT PREMIER" large area ball bonder manufactured by Kulicke & Soffa Industries Inc., having a total bond placement accuracy of about +/- 5 μm at pitches down to about 65 μm. Bonding capillaries are available from SPT (Small Precision Tools) of Petaluma, CA, and from Kulicke & Soffa Industries Inc.

[0107] The bonding capillary 110 (Figure 13B) is configured to form a continuous length of bonding wire into the wire 30A (Figure 13B) for the through wire interconnect 14A (Figure 13B), and to form the bonded connections 42 A with the substrate contacts 2OA. Previously incorporated US application serial nos.

11/102,408 and 11/296,057 further describe the bonding step. However, in this embodiment the bonding capillary 110 is controlled such that the wires 30A follow the contour of the polymer members 58A, and have the high loop portions 50A. Further, the polymer members 58A can be in a semi-cured or B-stage condition during the bonding step, such that the loop portions 50A of the wires 3OA are in effect embedded in the polymer members 58 A. Further, the outside surfaces of the loop portions 50A can have outer layers 6OA (Figure 4D) formed of a wear resistant metal such as nickel. The wear resistant metal can be provided on the wires 30A from the outset, or can be plated on the loop portions 50A following the bonding step.

[0108] Following the bonding step, the bonding members 32A (Figure 4B) can be formed on the bonded connections 42A, using a suitable process such as ball bumping, stud bumping or reflow bonding, as further described in previously incorporated US application serial nos. 1 1/102,408 and 11/296,057. The semiconductor substrate 12A can then be thinned from the back side to expose the ball contacts 46A. However, prior to the thinning step the film assisted molding process shown in Figures 1 IA-I ID and 12A-12C can be used to form polymer layers (e.g., 16B-1 in Figure 5) as required.

[0109] Referring to Figure 14, essentially the same film assisted molding process shown in Figures 11 A-I ID and 12A-12C, can be used to fabricate an alternate embodiment encapsulated semiconductor component 1OE. The encapsulated semiconductor component 1OE includes a polymer layer 16E which encapsulates the circuit side 17, the back side 18, and the sides 52 of the semiconductor substrate 12. In this embodiment, the polymer layer 16E encapsulates all six sides of the semiconductor substrate 12, and the component 1OE is referred to as 6X component. Alternately, a polymer layer can be configured to encapsulate only the circuit side 17 and the back side 18 of the substrate 12, such that a 2X component would be provided. US Patent No. 6,908,784, which is incorporated herein by reference, discloses different configurations of encapsulated semiconductor components.

[0110] Referring to Figure 15A-15D, essentially the same film assisted molding process shown in Figures 1 IA-I ID and 12A-12C, can be used to fabricate any of the previously described through wire interconnects in which the polymer layer which encapsulates the component, also fills the via in place of the polymer material.

For illustrative purposes fabrication of the semiconductor component 14-11 of Figure 2K is illustrated.

[0111] Initially, as shown in Figure 15A, the via 28-11 and the insulating layer 34-11 are formed in the substrate contact 20-11 substantially as previously described for Figure 13 A. In addition, a vent 108-11 to the via 28-11 is formed. Next as shown in Figure 15B ₅ the bonding member 32-11 is formed on the substrate contact 20-11. The bonding member 32-11 can comprise a stud bump, or a ball bump, bonded to the substrate contact 20-11 using a wire bonder, a stud bumper, or a ball bumper. Alternately, the bonding member 32-11 can comprise a solder bump, a welded connection, or a conductive polymer connection.

[0112] Next, as shown in Figure 15C, a bonding capillary 112 is used to place the wire 30-11 in the via 28-11, and to form the bonded connection 42-11 between the wire 30-11 and the bonding member 32-11. The wire 30-11 can touch the via 28-11 as shown or can be suspended in the via 28-11.

[0113] Next, as shown in Figure 15D, a film assisted molding process is performed substantially as shown in Figures 1 IA-I ID and 12A-12C to form the polymer layer 16-11. During the molding process, the mold film 104 protects portions of the wire 30-11 and the bonding member 32-1 1 , so that they remain unencapsulated as previously described. In addition, the mold compound flows into the via 28-11 to fill the via 28-11 and secure the wire 30-11. Although the wire 30-11 may be pushed during molding, and some buckling can occur, this can be tolerated as long as shorting to other elements by the wire 30-11, and removal of the insulating layer 34-1 1 does not occur. During the molding process, the vent 108-11 allows air to escape from the via 28-11 and the molding compound to flow freely into the via 28- 11. A vacuum can also be applied to the vent 108-11 to facilitate filling of the via 28- 11 by the mold compound. During the molding process, the vent 108-11 can also function to center the wire 30-11 in the via 28-11. In addition, the molding process can be performed to prevent the molding compound from flowing through the vent 108-11 onto the back side of the substrate 12-11. However, for some applications the vent 108-11 may not be required, such as when a vacuum is pulled on the mold cavities 102 (Figure 1 IB). Following the molding process, the mold film 104 can be removed, and the back side of the substrate 12-11 thinned by etching or grinding to expose the ball contact 46- 11.

[0114] Referring to Figures 16A-16C, a method for fabricating a semiconductor component 10-13 (Figure 16C) is illustrated using a film frame molding process to form the polymer layer 16-13 (Figure 16C) for the semiconductor component 10-13 (Figure 16C). Initially, as shown in Figure 16A, a plurality of semiconductor substrates 12-13 are provided on a component substrate 94, such as a semiconductor wafer, substantially as previously described and shown in Figure 12A. In addition, through wire interconnects 14-13 are formed on the semiconductor substrates 12-13, substantially as previously described and shown in Figure 12 A. The through wire interconnects 14-13 also include conductors 31-13 and pads 33-13, substantially as previously described and shown in Figure 2M.

[0115] As shown in Figure 16B, following fabrication of the through wire interconnects 14-13, the component substrate 94 is singulated into separate semiconductor substrates 12-13. The singulation step can be performed using a suitable process such as saw cutting, etching or liquid jetting. In addition, following singulation, the semiconductor substrates 12-13 can be tested by placing the pads 33- 13 in electrical communication with testing circuitry 114. For example, the semiconductor substrates 12-13 can be placed in a test fixture, substantially as described in US Patent No. 5,519,332 entitled "Carrier For Testing An Unpackaged Semiconductor Die", which is incorporated herein by reference. Each semiconductor substrate 12-13 can thus be certified as a known good die (KGD). Alternately, the testing can be performed at the wafer level on the semiconductor substrates 12-13 while they are still contained on the component substrate 94. In this case, the pads 33-13 provide electrical connection points for a probe card or other wafer level test device.

[0116] As also shown in Figure 16B, the singulated and tested semiconductor substrates 12-13 can be placed on a film frame 1 16. The film frame 116 can comprise a conventional film frame used in the semiconductor industry. In addition, a conventional pick and place process can be used to place the semiconductor substrates 12-13 on the film frame 116.

[0117] Next, as shown in Figure 16C. a film assisted molding process, substantially as previously described and shown in Figures 1 IA-I ID, can be performed to form the polymer layer 16-13 for the semiconductor component 10-13. However, in this case the semiconductor substrates 12-13 are contained on the film

frame 116 during the film assisted molding process. As previously described, the tip portions of the bonding members 32-13 of the through wire interconnects 14-13 are protected by a mold film 104 (Figure 1 IB) and remain unencapsulated during the film assisted molding process. As also shown in Figure 16C ₅ following the film assisted molding process the semiconductor components 10-13 are singulated by cutting through the polymer material between adjacent semiconductor substrates 12-13 on the film frame 116. In Figure 16C, the saw cuts are indicated by cut lines 118. With this process the polymer layer 16-13 covers the circuit side and four edges of the semiconductor substrates 12-13, such that the completed semiconductor components 10-13 have a 5X configuration.

[0118] In an illustrative embodiment a semiconductor component includes a semiconductor substrate having a first side (circuit side), a second side (back side), and a plurality of integrated circuits. The semiconductor component also includes a plurality of substrate contacts on the first side, a plurality of through wire interconnects (TWI) bonded to the substrate contacts, and a polymer layer on the first side encapsulating at least portions of the through wire interconnects.

[0119] Each through wire interconnect (TWI) includes a via through a substrate contact and through the substrate to the second side, a wire in the via bonded to the substrate contact, a first contact on the wire proximate to the first side, and a second contact on the wire proximate to the second side. In the illustrative embodiment the first contact comprises a tip portion of the bonding member on the substrate contact encapsulated by the polymer layer, and the second contact comprises an exposed end of the wire.

[0120] The semiconductor component can also include a polymer member on the substrate contact which supports and maintains a planarity of a loop portion of the wire. In addition, the loop portion of the wire can be configured as a third contact with the polymer member providing a force for making a connection with a mating contact on a device under test or a next level substrate. The contacts on the wire can also include outer layers configured to provide abrasion resistance, and enhanced penetration of oxide or contaminants on the mating contact.

[0121] The semiconductor component can be used as a stand alone device, or in combination with other semiconductor components to fabricate semiconductor systems. The semiconductor systems can include singulated components bonded to

one another (singulated system), or singulated semiconductor components bonded to a semiconductor wafer (wafer system), or semiconductor components contained on a semiconductor wafer bonded to another semiconductor wafer (wafer to wafer system). With each system, the through wire interconnects (TWI) provide a signal transmission system, and bonding structures between adjacent stacked components and next level substrates as well. The semiconductor component can also be used to fabricate test systems with the through wire interconnects (TWI) functioning as contact structures for making temporary and/or permanent electrical connections with a device under test.

[0122] The method for fabricating a semiconductor component with through wire interconnects (TWI) includes the steps of: providing a semiconductor substrate with substrate contacts, forming vias through the substrate, placing the wires in the vias. bonding the wires to the substrate contacts, forming bonding members on the wires and the substrate contacts, and forming a polymer layer on the first side substantially encapsulating loop portions of the wires and the bonding members. The polymer layer can be formed using a film assisted molding process including the steps of: forming a mold film on tip portions of the bonding members, molding the polymer layer, and then removing the mold film to expose the tip portions of the bonding members.

[0123] While a number of exemplary aspects and embodiments have been discussed above, those of skill in the art will recognize certain modifications, permutations, additions and subcombinations thereof. It is therefore intended that the following appended claims and claims hereafter introduced are interpreted to include all such modifications, permutations, additions and sub-combinations as are within their true spirit and scope.