Title:
SEMICONDUCTOR DEFECT JUDGMENT METHOD, COMPUTER DEVICE AND READABLE STORAGE MEDIUM
Document Type and Number:
WIPO Patent Application WO/2023/206647
Kind Code:
A1
Abstract:
The embodiments of the present disclosure belong to the technical field of semiconductor manufacturing, and particularly relate to a semiconductor defect judgment method, a computer device and a readable storage medium. The judgment method comprises: a semiconductor structure is provided, the semiconductor structure comprises a substrate and a plurality of bit line structures arranged at intervals in a second direction, and the bit line structures extend in a first direction and comprise a first region and a second region in the first direction; the side walls of the bit line structures are irradiated by a charged particle beam in a third direction; the width of the first region and the width of the second region of each bit line structure are obtained, the width of the first region being the width of the first region in the second direction, and the width of the second region being the width of the second region in the second direction; and whether the semiconductor structure has defects is judged on the basis of the width of the first region and the width of the second region. By means of the judgment method, the defect of the semiconductor structure can be monitored in real time, and the performance of the semiconductor structure can be improved.
Inventors:
LIU LINGHAI (CN)
Application Number:
PCT/CN2022/093515
Publication Date:
November 02, 2023
Filing Date:
May 18, 2022
Export Citation:
Assignee:
CHANGXIN MEMORY TECH INC (CN)
International Classes:
G01N23/2251; H01L21/66
Foreign References:
| CN113053771A | 2021-06-29 | |||
| CN113741154A | 2021-12-03 | |||
| US20190204247A1 | 2019-07-04 |
Other References:
LI, HONGBO ET AL.: "A Measurement Method of Critical-dimensions Line-edge-roughness Based on Image Processing", METROLOGY SCIENCE AND TECHNOLOGY, no. 09, 18 September 2004 (2004-09-18), pages 3 - 5, XP009550081, ISSN: 2096-9015
Attorney, Agent or Firm:
LEADER PATENT & TRADEMARK FIRM (CN)
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