SEMICONDUCTOR DEVICE INSPECTION DEVICE AND SEMICONDUCTOR DEVICE INSPECTION METHOD

WIPO Patent Application WO/2014/119676

A1

This semiconductor device inspection device is provided with a laser light source, a tester which applies a test signal that drives the semiconductor device, an optical sensor which detects reflected light and outputs a detection signal, a first spectrum analyzer which measures first phase information, which is phase information of the detected signal, a reference signal generating unit which generates a reference signal of a prescribed frequency, a second spectrum analyzer which measures second phase information, which is phase information of the reference signal, and an analysis unit which, on the basis of the first phase information and the second phase information, derives phase information of the detection signal at a prescribed frequency, wherein the first spectrum analyzer measures the first phase information relative to a reference frequency, the second spectrum analyzer measures the second phase information relative to a reference frequency, and the frequency of the reference signal of the first spectrum analyzer and the phase thereof are in synchronization with the frequency of the reference signal of the second spectrum analyzer and the phase thereof.

NAKAMURA TOMONORI (JP)
NISHIZAWA MITSUNORI (JP)

PCT/JP2014/052146

August 07, 2014

January 30, 2014

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HAMAMATSU PHOTONICS KK (JP)

G01R31/302; H01L21/66

JPH0513522A	1993-01-22
JPH05164788A	1993-06-29
JPH07134147A	1995-05-23
JPH08211131A	1996-08-20

HASEGAWA Yoshiki et al. (JP)
Yoshiki Hasegawa (JP)

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