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Patent Searching and Data


Title:
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2015/040798
Kind Code:
A1
Abstract:
In the present invention, a first substrate is provided with an insulating first surface film on the uppermost layer and a first electrode and an insulating second surface film inside each of a plurality of openings in the first surface film. A second substrate is provided with an insulating third surface film on the uppermost layer and a second electrode and an insulating fourth surface film inside each of a plurality of openings in the third surface film. The first and second electrodes, the first and third surface films, and the second and fourth surface films are each direct joined to each other, respectively. The bottom surface of the second surface film is directly connected to a first seal ring in the first substrate, and the bottom surface of the fourth surface film is directly connected to a second seal ring in the second substrate. A seal ring that is continuous between the first substrate and the second substrate comprises the first seal ring, the second surface film, the fourth surface film and the second seal ring.

Inventors:
KABE TATSUYA
ARAI HIDEYUKI
Application Number:
PCT/JP2014/004347
Publication Date:
March 26, 2015
Filing Date:
August 25, 2014
Export Citation:
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Assignee:
PANASONIC IP MAN CO LTD (JP)
International Classes:
H01L27/00; H01L21/3205; H01L21/768; H01L23/12; H01L23/522; H01L25/065; H01L25/07; H01L25/18
Foreign References:
JP2009049313A2009-03-05
JP2012099742A2012-05-24
JP2011054637A2011-03-17
JP2012019147A2012-01-26
US20070018331A12007-01-25
JP2009105160A2009-05-14
JPH06196569A1994-07-15
Attorney, Agent or Firm:
FUJII, Kentaro et al. (JP)
Fujii Kentaro (JP)
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