Title:
SEMICONDUCTOR DEVICE, MANUFACTURING METHOD THEREOF, AND ELECTRONIC APPARATUS COMPRISING SAME
Document Type and Number:
WIPO Patent Application WO/2018/059107
Kind Code:
A1
Abstract:
A semiconductor device, manufacturing method thereof, and electronic apparatus comprising same. The semiconductor device comprises: a substrate (1001); a cylindrical active region extending vertically upward from the substrate, wherein the active region comprises a first source/drain region in a lower region thereof, a second source/drain region in an upper region thereof, a trench region between the first source/drain region and the second source/drain region and near a surface of a periphery of the active region, and a bulk region (1005) on an inner side of the trench region; and a gate stack formed around a periphery of the trench region.
Inventors:
ZHU HUILONG (US)
Application Number:
PCT/CN2017/095124
Publication Date:
April 05, 2018
Filing Date:
July 31, 2017
Export Citation:
Assignee:
INST OF MICROELECTRONICS CAS (CN)
International Classes:
H01L21/336; H01L29/78
Foreign References:
| CN106298778A | 2017-01-04 | |||
| US20160049397A1 | 2016-02-18 | |||
| CN104022121A | 2014-09-03 | |||
| CN105280705A | 2016-01-27 |
Attorney, Agent or Firm:
CHINA SCIENCE PATENT & TRADEMARK AGENT LTD. (CN)
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