Title:
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2018/185839
Kind Code:
A1
Abstract:
A multi-finger transistor having a plurality of control electrodes (2), a plurality of first electrodes (3), and a plurality of second electrodes (4) is formed on a semiconductor substrate (1). The transistor is covered with resin films (14, 15). First wiring (8) that electrically connects the first electrodes (3) to each other is formed on the resin films (14, 15). Contact portions between the first wiring (8) and the first electrodes (3) are covered with the resin films (14, 15). A hollow structure (16) hermetically sealed by the resin films (14, 15) is formed around the control electrodes (2) and the second electrodes (4).
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Inventors:
MAEDA KAZUHIRO (JP)
HISAKA TAKAYUKI (JP)
KURUSU HITOSHI (JP)
HISAKA TAKAYUKI (JP)
KURUSU HITOSHI (JP)
Application Number:
PCT/JP2017/014100
Publication Date:
October 11, 2018
Filing Date:
April 04, 2017
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP (JP)
International Classes:
H01L29/812; H01L21/338
Foreign References:
| JP2013055126A | 2013-03-21 |
Attorney, Agent or Firm:
TAKADA, Mamoru et al. (JP)
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