Title:
SEMICONDUCTOR DEVICE, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SOLID-STATE IMAGE SENSOR, IMAGING DEVICE, AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/152513
Kind Code:
A1
Abstract:
The present invention pertains to: a semiconductor device which is capable of suppressing dielectric breakdown caused by Cu diffusion which occurs when electrodes of a wafer are bonded together and suppressing the generation of a leakage current; a method for manufacturing the semiconductor device; a solid-state image sensor; an imaging device; and an electronic device. An electrode made of metal is disposed on the surface of a substrate, a non-metallic region composed of SiO2 is formed by an insulating film, and the surfaces of two substrates including the electrode and the non-metallic region and having a void formed so as to surround the electrode in a structure preventing the metal from diffusing to the non-metallic region after the insulation film is disposed on the outermost surface, are bonded together such that the electrodes face each other. The present invention can be applied to a CMOS image sensor.
Inventors:
FUJII NOBUTOSHI (JP)
NAGAHAMA YOSHIHIKO (JP)
FURUSE SHUNSUKE (JP)
HAGIMOTO YOSHIYA (JP)
YAMAMOTO YUICHI (JP)
KOMAI NAOKI (JP)
TAKIMOTO KAORI (JP)
NAGAHAMA YOSHIHIKO (JP)
FURUSE SHUNSUKE (JP)
HAGIMOTO YOSHIYA (JP)
YAMAMOTO YUICHI (JP)
KOMAI NAOKI (JP)
TAKIMOTO KAORI (JP)
Application Number:
PCT/JP2016/057280
Publication Date:
September 29, 2016
Filing Date:
March 09, 2016
Export Citation:
Assignee:
SONY CORP (JP)
International Classes:
H01L21/768; H01L21/02; H01L21/60; H01L23/522; H01L25/065; H01L25/07; H01L25/18; H01L27/00; H01L27/14; H04N5/369; H04N5/374
Domestic Patent References:
WO2007138921A1 | 2007-12-06 |
Foreign References:
JP2014187166A | 2014-10-02 | |||
JP2013033786A | 2013-02-14 | |||
JP2014170793A | 2014-09-18 | |||
JP2013038112A | 2013-02-21 | |||
JP2013168419A | 2013-08-29 | |||
JP2013533629A | 2013-08-22 |
Attorney, Agent or Firm:
NISHIKAWA Takashi et al. (JP)
Nishikawa 孝 (JP)
Nishikawa 孝 (JP)
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