Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/115479
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a technique that is capable of suppressing cracking of a crystalline nitride layer, which occurs due to a stress caused by the difference between the thermal expansion coefficients of a crystalline nitride and diamond. This semiconductor device is provided with a crystalline nitride layer, a structure containing silicon, and a diamond layer. The structure is provided on a first main surface of the crystalline nitride layer. The diamond layer is arranged on at least a lateral part of the structure; and a gap is provided between the diamond layer and the first main surface of the crystalline nitride layer. The gap serves, for example, as a stress absorbing space.

More Like This:
JP2995358[Title of Invention] Method for producing carbon material
JP5532557Gas barrier sheet, manufacturing method of gas barrier sheet, sealant, and organic EL display
WO/1997/045855HIGHLY TETRAHEDRAL AMORPHOUS CARBON FILMS AND METHODS FOR THEIR PRODUCTION
Inventors:
FURUHATA TAKEO (JP)
SHINAGAWA TOMOHIRO (JP)
Application Number:
PCT/JP2016/067481
Publication Date:
July 06, 2017
Filing Date:
June 13, 2016
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
MITSUBISHI ELECTRIC CORP (JP)
International Classes:
C23C16/27; H01L21/338; C30B29/38; H01L21/205; H01L29/267; H01L29/778; H01L29/812
Domestic Patent References:
WO2015027080A22015-02-26
Foreign References:
JP2015517205A2015-06-18
JP2010067662A2010-03-25
JP2004532513A2004-10-21
JP2013211303A2013-10-10
Attorney, Agent or Firm:
YOSHITAKE Hidetoshi et al. (JP)
Download PDF:
View/Download PDF      PDF Help



 
Previous Patent: BARBECUE GRILL AND COOKING METHOD USING BARBECUE GRILL

Next Patent: COMPOSITION FOR PET FOOD, FOOD GRAINS FOR PET FOOD, PET FOOD, AND PET FOOD PACKAGE