Title:
SEMICONDUCTOR DEVICE TESTING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2023/158270
Kind Code:
A1
Abstract:
A semiconductor device testing apparatus according to one embodiment comprises: a thermoelement module having both-side surfaces converted into heating surfaces or cooling surfaces according to the direction of a current; a cooling module, which is arranged on the thermoelement module and cools a thermoelement; a pusher module which is arranged under the thermoelement module, and which comes in contact with a device to be tested, mounted in a holder, so as to heat or cool the device to be tested; and a control module for controlling the direction of a current supplied to the thermoelement module according to a target temperature value.
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Inventors:
CHOI BYEONG-GYU (KR)
MUTO SHUNICHI (KR)
MUTO SHUNICHI (KR)
Application Number:
PCT/KR2023/002357
Publication Date:
August 24, 2023
Filing Date:
February 17, 2023
Export Citation:
Assignee:
CHOI BYEONG GYU (KR)
International Classes:
G01R31/28; H10N10/10
Foreign References:
| KR102036673B1 | 2019-10-25 | |||
| JP2019204809A | 2019-11-28 | |||
| JP2005101544A | 2005-04-14 | |||
| JPH1079532A | 1998-03-24 | |||
| KR102436204B1 | 2022-08-25 |
Attorney, Agent or Firm:
DAE-A INTELLECTUAL PROPERTY CONSULTING (KR)
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