Title:
SEMICONDUCTOR DEVICE
Document Type and Number:
WIPO Patent Application WO/2014/010243
Kind Code:
A1
Abstract:
A mirror array (100) provided with a first mirror (131A), and a second mirror (131B) that is disposed so that a gap (G0) is open between the first mirror (131A) and the second mirror (131B). The first mirror (131A) and the second mirror (131B) are formed so as to be movable. At the gap (G0), the second mirror (131B) is provided with a protrusion (134) that protrudes towards the first mirror (131A). The areas of the second mirror (131B) that are adjacent to the protrusion (134) are provided with recesses (135a, 135b).
Inventors:
KIUCHI MARIO (JP)
UCHINO RYOHEI (JP)
MISAKI TOKIKO (JP)
TORAYASHIKI OSAMU (JP)
UCHINO RYOHEI (JP)
MISAKI TOKIKO (JP)
TORAYASHIKI OSAMU (JP)
Application Number:
PCT/JP2013/004275
Publication Date:
January 16, 2014
Filing Date:
July 10, 2013
Export Citation:
Assignee:
SUMITOMO PRECISION PROD CO (JP)
International Classes:
G02B26/08; B81B3/00
Domestic Patent References:
| WO2008129988A1 | 2008-10-30 |
Foreign References:
| JP2006337858A | 2006-12-14 | |||
| JP2007248731A | 2007-09-27 | |||
| JP2010026162A | 2010-02-04 | |||
| JP2006106737A | 2006-04-20 | |||
| JP2009229916A | 2009-10-08 |
Attorney, Agent or Firm:
MAEDA & PARTNERS (JP)
Patent business corporation MAEDA PATENT OFFICE (JP)
Patent business corporation MAEDA PATENT OFFICE (JP)
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