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Patent Searching and Data


Title:
SEMICONDUCTOR DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/038150
Kind Code:
A1
Abstract:
A semiconductor device is provided with a fixed electrode (11), a movable electrode (12), and an elastic support body (13). The movable electrode faces a principal surface (11b) of the fixed electrode and is relatively movable with respect to the fixed electrode along the principal surface. The elastic support body supports the movable electrode so that the movable electrode is movable in an expansion-contraction direction. One of the fixed electrode and the movable electrode is an electret electrode. The fixed electrode and the movable electrode each have a plurality of electrode portions periodically formed in the expansion-contraction direction. The formation pitch of the electrode portions constituting the fixed electrode and the movable electrode is made smaller than twice a movement distance of the movable electrode from a state in which the movable electrode remains stationary to a state in which the elastic support body is compressed to a maximum extent. In the state in which the movable electrode remains stationary, when the principal surface is viewed in a plan view, the movable electrode is arranged at a position where the fixed electrode and the movable electrode are not overlapped with each other. In a state in which the movable electrode vibrates, a state occurs in which the fixed electrode and the movable electrode are overlapped with each other.

Inventors:
GODA Kenta (C/O DENSO CORPORATION, 1-1 Showa-ch, Kariya-city Aichi 61, 〒4488661, JP)
PAUL Oliver Marius (Friedrichstr. 39, Freiburg, 79098, DE)
Application Number:
JP2017/030095
Publication Date:
March 01, 2018
Filing Date:
August 23, 2017
Export Citation:
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Assignee:
DENSO CORPORATION (1-1 Showa-cho, Kariya-city Aichi, 61, 〒4488661, JP)
UNIVERSITY OF FREIBURG (Friedrichstr. 39, Freiburg, 79098, DE)
International Classes:
H02N1/06; B81B3/00; H01G7/06
Foreign References:
JP2009095181A2009-04-30
JP2009089476A2009-04-23
JP2011036089A2011-02-17
JP2014228283A2014-12-08
JP2009081950A2009-04-16
Attorney, Agent or Firm:
JIN Shunji (6th Floor, Takisada Bldg. 2-13-19, Nishiki, Naka-k, Nagoya-city Aichi 03, 〒4600003, JP)
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