Title:
SEMICONDUCTOR GAS PIPE FITTING FASTENER
Document Type and Number:
WIPO Patent Application WO/2023/075106
Kind Code:
A1
Abstract:
A semiconductor gas pipe fitting fastener is disclosed. The semiconductor gas pipe fitting fastener of the present invention comprises: a female fitting part that is connected to one-side pipe through which gas used for a semiconductor process flows; a male fitting part that is connected to the other-side pipe positioned opposite to the one-side pipe and is connected to the female fitting part; a female nut part within which the female fitting part is supported; a male nut part within which the male fitting part is supported and which is coupled to the female nut part to connect the female fitting part and the male fitting part to each other; and a gasket part which is supported at one side thereof by the female fitting part and is supported at the other side thereof by the male nut part to prevent gas leakage between the female fitting part and the male fitting part.
Inventors:
NOH EUNSIK (KR)
LEE SUNRYONG (KR)
LEE SUNRYONG (KR)
Application Number:
PCT/KR2022/012294
Publication Date:
May 04, 2023
Filing Date:
August 17, 2022
Export Citation:
Assignee:
DK LOK CORP (KR)
International Classes:
H01L21/67; F16L19/02
Foreign References:
| KR101992086B1 | 2019-06-21 | |||
| JP2008216156A | 2008-09-18 | |||
| JP2017106562A | 2017-06-15 | |||
| KR101407676B1 | 2014-06-13 | |||
| JP2003028396A | 2003-01-29 |
Attorney, Agent or Firm:
JEON, Jonghag (KR)
Download PDF: