Title:
SEMICONDUCTOR INERTIA SENSOR AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2011/074056
Kind Code:
A1
Abstract:
Disclosed are semiconductor inertia sensors (1-3), each of which is mounted on a vehicle and detects an inertia force.
Each of the semiconductor inertia sensors (1-3) is characterized by comprising a sensor element supporting substrate (62) on which a sensor element that constitutes an inertia force detection unit (64) is mounted. Each of the semiconductor inertia sensors (1-3) is also characterized in that the sensor element supporting substrate (62) is provided with: (a) a fixation unit (66) that is fixed with respect to the sensor element supporting substrate (62); (b) a movable unit (69) that is movable with respect to the sensor element supporting substrate (62) and is connected to another substrates (12, 50) that support the sensor element supporting substrate (62); and (c) an elastic member (68) that connects the movable unit (69) and the fixation unit (66) with each other.
Inventors:
NARITA KATSUTOSHI (JP)
USHIJIMA TAKASHI (JP)
USHIJIMA TAKASHI (JP)
Application Number:
PCT/JP2009/070847
Publication Date:
June 23, 2011
Filing Date:
December 14, 2009
Export Citation:
Assignee:
TOYOTA MOTOR CO LTD (JP)
NARITA KATSUTOSHI (JP)
USHIJIMA TAKASHI (JP)
NARITA KATSUTOSHI (JP)
USHIJIMA TAKASHI (JP)
International Classes:
G01C19/5733; G01C19/5769; G01P15/125
Foreign References:
| JP2006194681A | 2006-07-27 | |||
| JP2008014633A | 2008-01-24 | |||
| JP2008076263A | 2008-04-03 |
Attorney, Agent or Firm:
ITOH, TADAHIKO (JP)
Tadahiko Ito (JP)
Tadahiko Ito (JP)
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