SEMICONDUCTOR LIGHT DETECTING ELEMENT - HAMAMATSU PHOTONICS K.K.

Title:

SEMICONDUCTOR LIGHT DETECTING ELEMENT

Document Type and Number:

WIPO Patent Application WO/2011/129149

Kind Code:

A1

Abstract:

Disclosed is a semiconductor light detecting element (1A), which is provided with: a silicon substrate (2) having a semiconductor layer (20), and an epitaxial semiconductor layer (21), which is grown on the semiconductor layer (20), and which has an impurity concentration lower than that of the semiconductor layer (20); and a conductor, which is provided on the surface of the epitaxial semiconductor layer (21). A photosensitive region is formed on the epitaxial semiconductor layer (21). Irregular recesses and projections (22) are formed at least on the surface (2BK) of the semiconductor layer (20), said surface facing the photosensitive region. The irregular recesses and projections (22) are optically exposed.

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Inventors:

MASE Mitsuhito (1126-1 Ichino-cho, Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)
間瀬　光人 (〒58 静岡県浜松市東区市野町１１２６番地の１　浜松ホトニクス株式会社内 Shizuoka, 〒4358558, JP)
SAKAMOTO Akira (1126-1 Ichino-cho, Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)
坂本　明 (〒58 静岡県浜松市東区市野町１１２６番地の１　浜松ホトニクス株式会社内 Shizuoka, 〒4358558, JP)
SUZUKI Takashi (1126-1 Ichino-cho, Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)

Application Number:

JP2011/053835

Publication Date:

October 20, 2011

Filing Date:

February 22, 2011

Export Citation:

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Assignee:

HAMAMATSU PHOTONICS K.K. (1126-1, Ichino-cho Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)
浜松ホトニクス株式会社 (〒58 静岡県浜松市東区市野町１１２６番地の１ Shizuoka, 〒4358558, JP)
MASE Mitsuhito (1126-1 Ichino-cho, Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)
間瀬　光人 (〒58 静岡県浜松市東区市野町１１２６番地の１　浜松ホトニクス株式会社内 Shizuoka, 〒4358558, JP)
SAKAMOTO Akira (1126-1 Ichino-cho, Higashi-ku, Hamamatsu-sh, Shizuoka 58, 〒4358558, JP)
坂本　明 (〒58 静岡県浜松市東区市野町１１２６番地の１　浜松ホトニクス株式会社内 Shizuoka, 〒4358558, JP)

International Classes:

H01L31/10; H01L27/146; H04N5/369

Attorney, Agent or Firm:

HASEGAWA Yoshiki et al. (SOEI PATENT AND LAW FIRM, Marunouchi MY PLAZA 9th fl. 1-1, Marunouchi 2-chome, Chiyoda-k, Tokyo 05, 〒1000005, JP)

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