Title:
SEMICONDUCTOR MANUFACTURING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2022/270945
Kind Code:
A1
Abstract:
A semiconductor manufacturing apparatus according to an embodiment of the present invention comprises: an ultraviolet generating part which is disposed in an ultraviolet generation chamber and generates ultraviolet rays of a target wavelength; a substrate driving part including a chuck which is disposed in a treatment chamber where a substrate fed therein is treated with ultraviolet rays and supports the fed substrate, and an axis which rotates and moves up and down the chuck; and a window which is disposed between the ultraviolet generation chamber and the treatment chamber and transmits the generated ultraviolet rays to the treatment chamber.
Inventors:
NA SEOUNG-JU (KR)
PARK HEUNG-GYOON (KR)
PARK HEUNG-GYOON (KR)
Application Number:
PCT/KR2022/008951
Publication Date:
December 29, 2022
Filing Date:
June 23, 2022
Export Citation:
Assignee:
NEXTIN INC (KR)
International Classes:
H01J37/32; H01L21/67; H05F3/00
Foreign References:
| JPH04181647A | 1992-06-29 | |||
| JPH0480372A | 1992-03-13 | |||
| KR20210075254A | 2021-06-23 | |||
| KR20170001817A | 2017-01-05 | |||
| US20110002674A1 | 2011-01-06 | |||
| KR102322101B1 | 2021-11-04 |
Attorney, Agent or Firm:
ISIS IP LAW LLC (KR)
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