Title:
SEMICONDUCTOR POSITION SENSOR
Document Type and Number:
WIPO Patent Application WO/2000/022680
Kind Code:
A1
Abstract:
The widths of resistor regions constituting a main conductive layer increase from one end toward the other, and the resistivities of the resistor regions are substantially the same. When the sensor is so positioned that electric charges generated correspondingly to incident light from an object to be measured at a far distance flow in narrow resistor regions, the output currents from both ends of the main conductive layer greatly change even if the position of incidence of the incident light is slightly displaced when the change of the distance to the object because the narrow resistor regions have high resistance values. Therefore, the accuracy of the position sensing is improved.
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Inventors:
TAKESHITA TATSUO (JP)
SAKAKIBARA MASAYUKI (JP)
SAKAKIBARA MASAYUKI (JP)
Application Number:
PCT/JP1998/004614
Publication Date:
April 20, 2000
Filing Date:
October 13, 1998
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
TAKESHITA TATSUO (JP)
SAKAKIBARA MASAYUKI (JP)
TAKESHITA TATSUO (JP)
SAKAKIBARA MASAYUKI (JP)
International Classes:
G01C3/08; G01D5/26; G01S3/781; G01S3/783; H01L31/02; (IPC1-7): H01L31/16; G01C3/06
Foreign References:
| JPH055619A | 1993-01-14 | |||
| JPH05118848A | 1993-05-14 | |||
| JPH06112520A | 1994-04-22 | |||
| JPH01115169A | 1989-05-08 | |||
| JPH01115170A | 1989-05-08 | |||
| JPH06140665A | 1994-05-20 | |||
| JPH04313279A | 1992-11-05 | |||
| JPH0513808A | 1993-01-22 |
Other References:
See also references of EP 1071140A4
Attorney, Agent or Firm:
Hasegawa, Yoshiki (6th floor 13-10, Kyobashi 2-chome Chuo-ku Tokyo, JP)
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