Title:
SEMICONDUCTOR PRESSURE SENSOR AND REGULATION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2002/077598
Kind Code:
A1
Abstract:
A semiconductor pressure sensor capable of regulating sensor characteristics while being built in a gauge case, and a regulation method therefor, the sensor comprising a semiconductor chip (1) having a pressure conversion circuit and a characteristic compensation circuit, a resin case (6) storing the chip (1), and a lead terminal (7) led to the outside from the resin case and formed integrally with the resin case. The resin case (6) comprises planar air-tight sealing surfaces (6C1, 6C2) formed on the upside and downside of the resin case, a reinforcing material (8) disposed inside of the sealing surfaces and formed integrally with the resin case so as to expose at part thereof from the case, and grooves (13, 14) provided between the sealing surfaces and the reinforcing material, the semiconductor chip (1) being disposed on the reinforcing material.
Inventors:
Miyazaki, Atsushi c/o Automotive, Products (Hitachi Ltd., 2520, Ohaza-Takab, Hitachinaka-shi Ibaraki, 312-0062, JP)
Ishikawa, Hitoshi c/o Automotive, Products (Hitachi Ltd., 2520, Ohaza-Takab, Hitachinaka-shi Ibaraki, 312-0062, JP)
Saito, Kazunori c/o Fuji Electric Co. Ltd. (1-1, Tanabeshinden, Kawasaki-k, Kawasaki-shi Kanagawa, 210-9530, JP)
Ashino, Kimihiro c/o Fuji Electric Co. Ltd. (1-1, Tanabeshinden, Kawasaki-k, Kawasaki-shi Kanagawa, 210-9530, JP)
Ueyanagi, Katsumichi c/o Fuji Electric Co. Ltd. (1-1, Tanabeshinden, Kawasaki-k, Kawasaki-shi Kanagawa, 210-9530, JP)
Ishikawa, Hitoshi c/o Automotive, Products (Hitachi Ltd., 2520, Ohaza-Takab, Hitachinaka-shi Ibaraki, 312-0062, JP)
Saito, Kazunori c/o Fuji Electric Co. Ltd. (1-1, Tanabeshinden, Kawasaki-k, Kawasaki-shi Kanagawa, 210-9530, JP)
Ashino, Kimihiro c/o Fuji Electric Co. Ltd. (1-1, Tanabeshinden, Kawasaki-k, Kawasaki-shi Kanagawa, 210-9530, JP)
Ueyanagi, Katsumichi c/o Fuji Electric Co. Ltd. (1-1, Tanabeshinden, Kawasaki-k, Kawasaki-shi Kanagawa, 210-9530, JP)
Application Number:
PCT/JP2002/002855
Publication Date:
October 03, 2002
Filing Date:
March 25, 2002
Export Citation:
Assignee:
HITACHI, LTD. (6 Kanda Surugadai 4-chome, Chiyoda-ku, Tokyo, 101-8010, JP)
FUJI ELECTRIC CO., LTD. (1-1 Tanabeshinden, Kawasaki-ku Kawasaki-shi, Kanagawa, 210-9530, JP)
Miyazaki, Atsushi c/o Automotive, Products (Hitachi Ltd., 2520, Ohaza-Takab, Hitachinaka-shi Ibaraki, 312-0062, JP)
Ishikawa, Hitoshi c/o Automotive, Products (Hitachi Ltd., 2520, Ohaza-Takab, Hitachinaka-shi Ibaraki, 312-0062, JP)
Saito, Kazunori c/o Fuji Electric Co. Ltd. (1-1, Tanabeshinden, Kawasaki-k, Kawasaki-shi Kanagawa, 210-9530, JP)
Ashino, Kimihiro c/o Fuji Electric Co. Ltd. (1-1, Tanabeshinden, Kawasaki-k, Kawasaki-shi Kanagawa, 210-9530, JP)
Ueyanagi, Katsumichi c/o Fuji Electric Co. Ltd. (1-1, Tanabeshinden, Kawasaki-k, Kawasaki-shi Kanagawa, 210-9530, JP)
FUJI ELECTRIC CO., LTD. (1-1 Tanabeshinden, Kawasaki-ku Kawasaki-shi, Kanagawa, 210-9530, JP)
Miyazaki, Atsushi c/o Automotive, Products (Hitachi Ltd., 2520, Ohaza-Takab, Hitachinaka-shi Ibaraki, 312-0062, JP)
Ishikawa, Hitoshi c/o Automotive, Products (Hitachi Ltd., 2520, Ohaza-Takab, Hitachinaka-shi Ibaraki, 312-0062, JP)
Saito, Kazunori c/o Fuji Electric Co. Ltd. (1-1, Tanabeshinden, Kawasaki-k, Kawasaki-shi Kanagawa, 210-9530, JP)
Ashino, Kimihiro c/o Fuji Electric Co. Ltd. (1-1, Tanabeshinden, Kawasaki-k, Kawasaki-shi Kanagawa, 210-9530, JP)
Ueyanagi, Katsumichi c/o Fuji Electric Co. Ltd. (1-1, Tanabeshinden, Kawasaki-k, Kawasaki-shi Kanagawa, 210-9530, JP)
International Classes:
G01L9/04; G01L9/00; G01L19/14; G01L27/00; H01L29/84; (IPC1-7): G01L9/04; G01L19/14; G01L27/00; H01L29/84
Attorney, Agent or Firm:
Kasuga, Yuzuru (7F. Kyodo Bldg.-Shinkodenmacho, 1-3 Nihonbashi-Kodenmach, Chuo-ku Tokyo, 103-0001, JP)
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