Title:
SEMICONDUCTOR PROCESS CHAMBER AND UPPER ELECTRODE STRUCTURE THEREOF
Document Type and Number:
WIPO Patent Application WO/2023/207550
Kind Code:
A1
Abstract:
The present invention provides a semiconductor process chamber and an upper electrode structure thereof. The upper electrode structure comprises a magnetron component, an emitting component, a receiving component, a target material and a signal processing device. The magnetron component is located above the target material. The emitting component and the receiving component are arranged opposite each other on two sides of the magnetron component in a horizontal direction. The emitting component is used for emitting a plurality of optical signals to the receiving component, and the plurality of optical signals are a plurality of light rays which are spaced apart from each other in a vertical direction. The receiving component is used for receiving the plurality of optical signals, converting the plurality of optical signals into electrical signals and sending the electrical signals to the signal processing device. The signal processing device is used for determining the vertical distance between the magnetron component and the target material according to the electrical signals. In the present invention, the magnetron component can block light rays, which are emitted by the emitting component, within a corresponding height range, so that the height of the magnetron component can be determined in real time according to the condition of the light rays that have been received by the receiving component, thereby improving the efficiency of determining the position of the magnetron component, and ensuring the accuracy of the position of the magnetron component.
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Inventors:
WANG LEI (CN)
YANG FAN (CN)
TIAN XIQIANG (CN)
YANG FAN (CN)
TIAN XIQIANG (CN)
Application Number:
PCT/CN2023/086808
Publication Date:
November 02, 2023
Filing Date:
April 07, 2023
Export Citation:
Assignee:
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD (CN)
International Classes:
H01L21/67; H01J37/34
Foreign References:
| CN114883171A | 2022-08-09 | |||
| CN113748486A | 2021-12-03 | |||
| JP2020169352A | 2020-10-15 | |||
| KR20010001581A | 2001-01-05 | |||
| KR20050007001A | 2005-01-17 |
Attorney, Agent or Firm:
TEE & HOWE INTELLECTUAL PROPER TY ATTORNEYS (CN)
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