Title:
SEMICONDUCTOR PRODUCTION APPARATUS
Document Type and Number:
WIPO Patent Application WO/2006/104121
Kind Code:
A1
Abstract:
A semiconductor production apparatus has a substrate conveyor for conveying a substrate, a substrate detection section having a light emission section for emitting light to the substrate and a light reception section for receiving the light in order to detect the substrate conveyed from the substrate conveyor, and a controller for receiving the data of the quantity of light received from the light reception section. The controller previously registers ranges of light quantity, which ranges are not superposed on each other, and, when the light emitted from the light emitting section reaches the light receiving section through the substrate, the controller determines to which one of the registered ranges of light quantity the quantity of the received light corresponds, and outputs an instruction depending on the range determined.
Inventors:
YAMAGISHI NORICHIKA (JP)
HISAKADO SADAO (JP)
HISAKADO SADAO (JP)
Application Number:
PCT/JP2006/306220
Publication Date:
October 05, 2006
Filing Date:
March 28, 2006
Export Citation:
Assignee:
HITACHI INT ELECTRIC INC (JP)
YAMAGISHI NORICHIKA (JP)
HISAKADO SADAO (JP)
YAMAGISHI NORICHIKA (JP)
HISAKADO SADAO (JP)
International Classes:
H01L21/66; H01L21/02
Foreign References:
| JPS5527624A | 1980-02-27 | |||
| JP2003007789A | 2003-01-10 | |||
| JP2003289097A | 2003-10-10 |
Attorney, Agent or Firm:
Kajiwara, Tatuya (Central Nishi-Shinjuku 9-5, Nishi-Shinjuku 8-chom, Shinjuku-ku Tokyo 23, JP)
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