Title:
SEMICONDUCTOR SUBSTRATE, IMAGE PICKUP ELEMENT, AND IMAGE PICKUP APPARATUS
Document Type and Number:
WIPO Patent Application WO/2014/125969
Kind Code:
A1
Abstract:
This semiconductor substrate is provided with: an alignment mark, which is formed of a material that reflects detection light for detecting positions, and which has an edge portion for detection; a light blocking layer section, which has a larger outer shape than the alignment mark, and which is formed of a material that blocks the detection light, said light blocking layer section being disposed at a position on the rear side of the alignment mark when viewed from the detection light input side; and one or more light transmitting layer sections, which are laminated between the alignment mark and the light blocking layer section, and which transmit the detection light, said light transmitting layer sections not being patterned at least in a range overlapping the light blocking layer section.
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Inventors:
TAKAZAWA NAOHIRO (JP)
TAKEMOTO YOSHIAKI (JP)
TAKEMOTO YOSHIAKI (JP)
Application Number:
PCT/JP2014/052577
Publication Date:
August 21, 2014
Filing Date:
February 04, 2014
Export Citation:
Assignee:
OLYMPUS CORP (JP)
International Classes:
H01L27/146; H04N5/369
Foreign References:
| JP2002025888A | 2002-01-25 | |||
| JP2013012634A | 2013-01-17 | |||
| JP2012015276A | 2012-01-19 | |||
| JP2008311413A | 2008-12-25 | |||
| JP2011009259A | 2011-01-13 |
Other References:
See also references of EP 2958146A4
Attorney, Agent or Firm:
TANAI Sumio et al. (JP)
Sumio Tanai (JP)
Sumio Tanai (JP)
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