Title:
SEMICONDUCTOR TEST CONTACTOR
Document Type and Number:
WIPO Patent Application WO/2017/119676
Kind Code:
A1
Abstract:
The present invention relates to a semiconductor test contactor for inspecting a semiconductor having a fine pitch. According to an embodiment of the present invention, the semiconductor test contactor includes a first probe part, a second probe part, and an elastic part. One end portion of the first probe part is brought into electric contact with a terminal of an inspection target device. One end portion of the second probe part is brought into electric contact with a pad of an inspection device. The elastic part is formed in one piece with the first and second probe parts and electrically connects the first and second probe parts to each other. The elastic part is thinner than the first and second probe parts, and both end portions of the elastic part are respectively connected to one side of the other end portion of the first probe part and one side of the other end portion of the second probe part. The elastic part is curved in a direction toward a first imaginary connection line connecting the other side of the other end portion of the first probe part to the other side of the other end portion of the second probe part, in such a manner that a center portion of the elastic part is not beyond the first imaginary connection line.
Inventors:
CHUNG YOUNG BAE (KR)
Application Number:
PCT/KR2016/015566
Publication Date:
July 13, 2017
Filing Date:
December 30, 2016
Export Citation:
Assignee:
ISC CO LTD (KR)
International Classes:
G01R1/067; G01R31/28
Foreign References:
| JP4434371B2 | 2010-03-17 | |||
| KR20070105362A | 2007-10-30 | |||
| JP2011133354A | 2011-07-07 | |||
| US20090224782A1 | 2009-09-10 | |||
| KR101082459B1 | 2011-11-11 |
Attorney, Agent or Firm:
Y.P.LEE, MOCK & PARTNERS (KR)
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