Title:
SEMICONDUCTOR X-RAY DETECTOR
Document Type and Number:
WIPO Patent Application WO/2012/015045
Kind Code:
A1
Abstract:
This semiconductor X-ray detector comprises a semiconductor X-ray sensor section (10) and a reading section (20). The semiconductor X-ray sensor section (10) has an opening (11) substantially in the center and contains many X-ray sensors formed in a pixel pattern. The reading section (20) is arranged on the rear surface of the semiconductor X-ray sensor section and subjects signals output from the X-ray sensors to a predetermined process to thereby output detection signals. The reading section is configured by integrally assembling a plurality of reading units (22) in a plane. Each reading unit is formed in a rectangular shape, has a plurality of pads formed on the front surface thereof, is provided with a plurality of processing circuits and vias, and is provided with a plurality of pads on the rear surface thereof. The semiconductor X-ray sensor section and the reading section are formed integrally by being laminated.
Inventors:
WATANABE Yoshiaki (3-9-12 Matsubara-cho, Akishima-sh, Tokyo 66, 〒1968666, JP)
渡邉 好章 (〒66 東京都昭島市松原町三丁目９番１２号 株式会社リガク内 Tokyo, 〒1968666, JP)
渡邉 好章 (〒66 東京都昭島市松原町三丁目９番１２号 株式会社リガク内 Tokyo, 〒1968666, JP)
Application Number:
JP2011/067515
Publication Date:
February 02, 2012
Filing Date:
July 29, 2011
Export Citation:
Assignee:
RIGAKU CORPORATION (3-9-12, Matsubara-cho Akishima-sh, Tokyo 66, 〒1968666, JP)
株式会社リガク (〒66 東京都昭島市松原町三丁目９番１２号 Tokyo, 〒1968666, JP)
WATANABE Yoshiaki (3-9-12 Matsubara-cho, Akishima-sh, Tokyo 66, 〒1968666, JP)
株式会社リガク (〒66 東京都昭島市松原町三丁目９番１２号 Tokyo, 〒1968666, JP)
WATANABE Yoshiaki (3-9-12 Matsubara-cho, Akishima-sh, Tokyo 66, 〒1968666, JP)
International Classes:
G01T1/24
Attorney, Agent or Firm:
POLAIRE I.P.C. (7-1 Hatchobori 2-chome, Chuo-ku Tokyo, 32, 〒1040032, JP)
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Claims: