Title:
SENSING TERMINAL AND SENSING METHOD
Document Type and Number:
WIPO Patent Application WO/2024/075679
Kind Code:
A1
Abstract:
A sensing terminal (500) comprises a detection sensor (511), a control unit (520), a battery (550), and an acceleration sensor (512). The detection sensor (511) detects the environment inside a substrate processing device (100). The control unit (520) can transition between an active state in which a prescribed operation is executed on the basis of detection results from the detection sensor (511) and a sleep state that has lower power consumption than the active state. The battery (550) supplies power to the control unit (520). The acceleration sensor (512) detects acceleration. The control unit (520) transitions between the active state and the sleep state on the basis of detection results from the acceleration sensor (512).
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Inventors:
SAITO KEISUKE (JP)
KAMON HIROAKI (JP)
KAMON HIROAKI (JP)
Application Number:
PCT/JP2023/035868
Publication Date:
April 11, 2024
Filing Date:
October 02, 2023
Export Citation:
Assignee:
SCREEN HOLDINGS CO LTD (JP)
International Classes:
H01L21/02; H01L21/304
Attorney, Agent or Firm:
MAEI Hiroyuki (JP)
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