Title:
SENSOR ARRANGEMENT
Document Type and Number:
WIPO Patent Application WO/2011/095286
Kind Code:
A3
Abstract:
The invention relates to a sensor arrangement, which is suitable in particular for high temperature environments. The sensor arrangement comprises a support element, which has at least one recess. A substrate is arranged on the support element. A membrane layer having one or more electrically conductive conductors is arranged over the substrate at least in the region of the recess. At least one sensor element, which is electrically conductively connected via a temperature-stable contacting means to at least one conductor, is arranged on the membrane layer.
Inventors:
ZOTL ERNST (AT)
NIESSNER GEORG (AT)
SCHMID ULRICH (AT)
SMETANA WALTER (AT)
NIESSNER GEORG (AT)
SCHMID ULRICH (AT)
SMETANA WALTER (AT)
Application Number:
PCT/EP2011/000264
Publication Date:
February 02, 2012
Filing Date:
January 22, 2011
Export Citation:
Assignee:
E & E ELEKTRONIK GMBH (AT)
UNIV WIEN TECH (AT)
ZOTL ERNST (AT)
NIESSNER GEORG (AT)
SCHMID ULRICH (AT)
SMETANA WALTER (AT)
UNIV WIEN TECH (AT)
ZOTL ERNST (AT)
NIESSNER GEORG (AT)
SCHMID ULRICH (AT)
SMETANA WALTER (AT)
International Classes:
G01D11/30; G01K1/16
Foreign References:
| US20020157463A1 | 2002-10-31 | |||
| US5798684A | 1998-08-25 | |||
| US20030019290A1 | 2003-01-30 | |||
| DE102006015384A1 | 2007-10-04 | |||
| DE102006032549A1 | 2008-01-17 |
Attorney, Agent or Firm:
HOFMANN, Ernst (PatentabteilungPostfach 12 60, Traunreut, DE)
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