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Title:
SENSOR DEVICE FOR DIAGNOSING SEMICONDUCTOR PROCESS
Document Type and Number:
WIPO Patent Application WO/2021/091249
Kind Code:
A1
Abstract:
The present invention provides a sensor device for diagnosing a semiconductor process, the sensor device comprising: a lower case which has a seating groove formed at one surface thereof; a circuit board on which an electronic component is mounted and which is placed in the seating groove; an upper case which has an insertion groove formed at one surface thereof, the electronic component being inserted into the insertion groove, and is assembled with the lower case; and a metal layer which is disposed on at least one of the one surface of the lower case and the one surface of the upper case.

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Inventors:
BAE JEONG WOON (KR)
JEON HO SEUNG (KR)
SONG JUNG SUB (KR)
Application Number:
PCT/KR2020/015383
Publication Date:
May 14, 2021
Filing Date:
November 05, 2020
Export Citation:
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Assignee:
EQCELL CO LTD (KR)
International Classes:
H01J37/32; H01L21/50; H01L21/66; H01L21/67
Foreign References:
KR102039985B12019-11-04
KR101991644B12019-09-30
KR20170072252A2017-06-26
KR20160129300A2016-11-09
KR20190011617A2019-02-07
Attorney, Agent or Firm:
ERUUM & LEEON INTELLECTUAL PROPERTY LAW FIRM (KR)
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