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Title:
SENSOR DEVICE AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2007/061050
Kind Code:
A1
Abstract:
Provided is a thin sensor device having a small sensor characteristic fluctuation. The sensor device includes a sensor unit having a supporting section, a movable section movably held to the supporting section and a detecting section for outputting an electric signal based on the positional displacement of the movable section. The sensor device also includes a base substrate bonded on the surface of the sensor unit. A conductor section is provided on the supporting section, and an electrode having a bump is arranged on the base substrate. The height of the bump is determined so that a distance between the movable section and the base substrate is equal to a distance specified by a dislocation quantity permitted by the movable section. Since the activating surface of the conductor section is directly bonded on the activating surface of the bump at a room temperature, the sensor characteristics are prevented from being fluctuated by residual stress on the bonding section.

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Inventors:
OKUDO TAKAFUMI (JP)
SUZUKI YUJI (JP)
TAKEGAWA YOSHIYUKI (JP)
BABA TORU (JP)
GOTOU KOUJI (JP)
MIYAJIMA HISAKAZU (JP)
KATAOKA KAZUSHI (JP)
SAIJO TAKASHI (JP)
Application Number:
PCT/JP2006/323448
Publication Date:
May 31, 2007
Filing Date:
November 24, 2006
Export Citation:
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Assignee:
MATSUSHITA ELECTRIC WORKS LTD (JP)
OKUDO TAKAFUMI (JP)
SUZUKI YUJI (JP)
TAKEGAWA YOSHIYUKI (JP)
BABA TORU (JP)
GOTOU KOUJI (JP)
MIYAJIMA HISAKAZU (JP)
KATAOKA KAZUSHI (JP)
SAIJO TAKASHI (JP)
International Classes:
H01L23/02; G01P15/08; H01L21/60
Foreign References:
JP2005129888A2005-05-19
JP2005127750A2005-05-19
JPH0212663U1990-01-26
JPH07283334A1995-10-27
JP2005311298A2005-11-04
JP2003318217A2003-11-07
JP2005191556A2005-07-14
JP2003234370A2003-08-22
JP2004085547A2004-03-18
JP3532788B22004-05-31
JPH05288771A1993-11-02
Attorney, Agent or Firm:
NISHIKAWA, Yoshikiyo et al. (Umeda-Daiichiseimei Bldg. 5F 12-17, Umeda 1-chome, Kita-k, Osaka-shi Osaka 01, JP)
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