Title:
SENSOR DEVICE
Document Type and Number:
WIPO Patent Application WO/2013/172010
Kind Code:
A1
Abstract:
A sensor device including a semiconductor substrate and a plurality of sensor units. The plurality of sensor units are arranged on one side of the semiconductor substrate and convert a physical quantity into an electrical signal. The one side is parallel to a regulated plane regulated by a mutually orthogonal X-direction and Y-direction. The semiconductor substrate has a center point, which is both the geometric center and the center of mass. The semiconductor substrate is shaped so as to be linearly symmetrical with respect to a first reference line that passes through the center point and is parallel to the X-direction and a second reference line that passes through the center point and is parallel to the Y-direction. Each of the plurality of sensor units is shaped so as to be linearly symmetrical with respect to the first reference line and the second reference line.
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Inventors:
ARIKI FUMIYOSHI (JP)
SAKAI MINEKAZU (JP)
SUGIMOTO KIYOMASA (JP)
SAKAI MINEKAZU (JP)
SUGIMOTO KIYOMASA (JP)
Application Number:
PCT/JP2013/003031
Publication Date:
November 21, 2013
Filing Date:
May 13, 2013
Export Citation:
Assignee:
DENSO CORP (JP)
International Classes:
G01P15/125; G01C19/5733; G01C19/5769; G01P15/18; H01L29/84
Foreign References:
| US20110296916A1 | 2011-12-08 | |||
| JP2012002752A | 2012-01-05 | |||
| US20090139330A1 | 2009-06-04 | |||
| JP2001525927A | 2001-12-11 | |||
| JP2010107325A | 2010-05-13 | |||
| JPH10178181A | 1998-06-30 | |||
| JP2009500635A | 2009-01-08 |
Attorney, Agent or Firm:
KIN, Junhi (JP)
Gold Junki (JP)
Gold Junki (JP)
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