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Patent Searching and Data


Title:
SENSOR DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/010177
Kind Code:
A1
Abstract:
The purpose of the present invention is to improve spatial resolution and detect localized variations in the physical properties of an examination subject. A sensor IC (1) comprises a semiconductor substrate (10) and a plurality of oscillators (20) having resonators, and the resonators of each of the plurality of oscillators (20) are made to vary the resonant frequency thereof according to the physical properties of the examination subject in the vicinity thereof, the distribution of the physical properties of the examination subject is detected on the basis of the resonant frequency and distribution of the resonators of the plurality of oscillators (20), and the distance between the centers of two of the plurality of resonators (20) that adjoin one another does not exceed 300μm.

Inventors:
MITSUNAKA, Takeshi
ASHIDA, Nobuyuki
SAITO, Akira
IIZUKA, Kunihiko
Application Number:
JP2016/065773
Publication Date:
January 19, 2017
Filing Date:
May 27, 2016
Export Citation:
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Assignee:
SHARP KABUSHIKI KAISHA (1 Takumi-cho, Sakai-ku Sakai Cit, Osaka 22, 〒5908522, JP)
International Classes:
G01N27/02; G01N22/00; G01N27/72; G01R27/26
Attorney, Agent or Firm:
HARAKENZO WORLD PATENT & TRADEMARK (Daiwa Minamimorimachi Building, 2-6 Tenjinbashi 2-chome Kita, Kita-ku, Osaka-sh, Osaka 41, 〒5300041, JP)
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