Title:
SENSOR DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/039028
Kind Code:
A1
Abstract:
This sensor device comprises: a detection unit comprising a sensor element that is disposed in a passage and detects a physical quantity relating to a gas that passes through the passage; a circuit substrate that is electrically connected to the detection unit; a fixing member for fixing the circuit substrate and detection unit; and a passage formation part. The passage formation part comprises, on the same surface, a first part that the fixing member is fixed to, a second part that opposes the circuit substrate via a gap, and a third part that is one of the surfaces forming the passage and opposes the sensor element via the passage.
Inventors:
NAKATSUCHI HIROKI (JP)
HIROHATA SHIGETO (JP)
IKEDA UKYO (JP)
HIROHATA SHIGETO (JP)
IKEDA UKYO (JP)
Application Number:
PCT/JP2020/023238
Publication Date:
March 04, 2021
Filing Date:
June 12, 2020
Export Citation:
Assignee:
HITACHI AUTOMOTIVE SYSTEMS LTD (JP)
International Classes:
G01F1/684
Foreign References:
JP2019095387A | 2019-06-20 | |||
JP2016075506A | 2016-05-12 | |||
JP2017083323A | 2017-05-18 |
Attorney, Agent or Firm:
SUNNEXT INTERNATIONAL PATENT OFFICE (JP)
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