Title:
SENSOR ELEMENT AND ANGULAR VELOCITY SENSOR
Document Type and Number:
WIPO Patent Application WO/2019/044697
Kind Code:
A1
Abstract:
This sensor element has a piezoelectric body and a plurality of electrodes when viewed in a plan view. The piezoelectric body comprises a base part and at least one arm part that extends from the base part. The plurality of electrodes are positioned on a surface of the arm part. The piezoelectric body surrounds the base part and the arm part when viewed in a plan view, and further comprises a frame part across which the base part lies.
Inventors:
SOEJIMA MUNETAKA (JP)
Application Number:
PCT/JP2018/031350
Publication Date:
March 07, 2019
Filing Date:
August 24, 2018
Export Citation:
Assignee:
KYOCERA CORP (JP)
International Classes:
G01C19/5628; H01L41/083
Foreign References:
JP2009156832A | 2009-07-16 | |||
JP2016173378A | 2016-09-29 | |||
JP2015099130A | 2015-05-28 | |||
JP2001227953A | 2001-08-24 |
Attorney, Agent or Firm:
IIJIMA, YASUHIRO (JP)
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