Title:
SENSOR ELEMENT AND ANGULAR VELOCITY SENSOR
Document Type and Number:
WIPO Patent Application WO/2020/067178
Kind Code:
A1
Abstract:
In a sensor element, an x-axis direction is a length direction of a frame. Two drive arms extend from the frame in a y-axis direction parallel to each other. A detection arm extends from the frame in the y-axis direction at a position centered between the two drive arms. A plurality of excitation wiring parts connect a plurality of excitation electrodes and terminals in a connection relationship in which the two drive arms vibrate in the x-axis direction at opposite phases. A first wiring part is connected to a first detection electrode and a first detection terminal. A second wiring part is connected to a second detection electrode and a second detection terminal. At least a section of the first wiring part and at least a section of the second wiring part extend in parallel on the frame, along a length which is 1/4 or more of a frame length in the length direction of the frame.
Inventors:
SOEJIMA MUNETAKA (JP)
TAKANAMI SHUN (JP)
TAKANAMI SHUN (JP)
Application Number:
PCT/JP2019/037633
Publication Date:
April 02, 2020
Filing Date:
September 25, 2019
Export Citation:
Assignee:
KYOCERA CORP (JP)
International Classes:
G01C19/5607; H01L41/113
Domestic Patent References:
| WO2018021166A1 | 2018-02-01 | |||
| WO2018021166A1 | 2018-02-01 | |||
| WO2018021167A1 | 2018-02-01 |
Foreign References:
| JP2016130646A | 2016-07-21 | |||
| US5763781A | 1998-06-09 |
Other References:
See also references of EP 3842742A4
Attorney, Agent or Firm:
IIJIMA, YASUHIRO (JP)
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