Title:
SENSOR ELEMENT AND COMPOSITE SENSOR
Document Type and Number:
WIPO Patent Application WO/2014/092060
Kind Code:
A1
Abstract:
This sensor element (1) is provided with a first mass (10) and a second mass (20) that oscillate in anti-phase to each other. The first and second masses (10, 20) are each provided with an acceleration detection unit and an angular velocity detection unit. The acceleration detection unit and angular velocity detection unit are formed at the first and second masses (10, 20) in a manner so that changes in capacitance stemming from the acceleration (a) in a first detection signal obtained from the first and second masses (10, 20) and changes in capacitance stemming from the acceleration (a) in a second detection signal obtained from the first and second masses (10, 20) in the same manner are in phase and at the same level, and changes in capacitance stemming from the angular velocity (ω) in the first detection signal obtained from the first and second masses (10, 20) and changes in capacitance stemming from the angular velocity (ω) in the second detection signal obtained from the first and second masses (10, 20) in the same manner are in anti-phase and at the same level.
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Inventors:
KATO YOSHITAKA (JP)
Application Number:
PCT/JP2013/083021
Publication Date:
June 19, 2014
Filing Date:
December 10, 2013
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
G01C19/5747; G01C19/5726; G01P15/125; H01L29/84
Foreign References:
| JP2004163376A | 2004-06-10 | |||
| JP2010085313A | 2010-04-15 | |||
| JP2007333467A | 2007-12-27 |
Attorney, Agent or Firm:
Kaede Patent Attorneys' Office (JP)
Patent business corporation Kaede Patent Attorneys' Office (JP)
Patent business corporation Kaede Patent Attorneys' Office (JP)
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