Title:
SENSOR ELEMENT AND SENSOR DEVICE HAVING SAME
Document Type and Number:
WIPO Patent Application WO/2022/202726
Kind Code:
A1
Abstract:
A sensor element comprising: a support (10) having a recess portion (10a) formed therein; and a sensing portion (30) disposed on the support (10) and having a floating region (21b) configured by the recess portion (10a). The sensing portion (30) has a part to be exposed to a measurement medium. In the part, a slit (40) through which the measurement medium can be passed is formed. In the slit (40), a protection film (80) is disposed which, while allowing for the maintenance of the state in which the measurement medium can be passed, is composed of a material having a higher liquid repellency than the sensing portion (30) or a material having a higher liquid-philicity than the sensing portion (30).
Inventors:
MAWATARI KAZUAKI (JP)
Application Number:
PCT/JP2022/012932
Publication Date:
September 29, 2022
Filing Date:
March 21, 2022
Export Citation:
Assignee:
DENSO CORP (JP)
International Classes:
H04R17/02; H01L29/84; H04R19/04
Foreign References:
| JP2002250665A | 2002-09-06 | |||
| JP2004020757A | 2004-01-22 | |||
| JPS5842723U | 1983-03-22 | |||
| JP5936154B2 | 2016-06-15 |
Attorney, Agent or Firm:
YOU-I PATENT FIRM (JP)
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