SENSOR ELEMENT, AND SENSOR DEVICE

Title:

SENSOR ELEMENT, AND SENSOR DEVICE

Document Type and Number:

WIPO Patent Application WO/2022/224879

Kind Code:

A1

Abstract:

The present invention achieves a sensor element and a sensor device for detecting electromagnetic waves using a thermoelectric conversion element, with a simple configuration and a large surface area. A sensor element 10 comprises: a board 102; a thermoelectric conversion element 108 in the shape of a rectangular cuboid, provided on the board 102; two low heat-conductivity insulating films 110 provided with left-right symmetry on both sides, in a width direction (x-direction), of the thermoelectric conversion element 108; electrodes 112a and 112b provided at both ends, in a longitudinal direction (y-direction), of the thermoelectric conversion element 108; a high heat-conductivity insulating film 106 provided in such a way as to cover the thermoelectric conversion element 108 and the low heat-conductivity insulating films 110; and an absorbent body 104 on the high heat-conductivity insulating film 106. The absorbent body 104 generates heat by absorbing electromagnetic waves, a portion of the generated heat flows to the thermoelectric conversion element 108 via the high heat-conductivity insulating film 106, and an electromotive force is generated in a direction (y-direction) orthogonal to both a temperature gradient (z-direction) and a magnetization (x-direction), by means of a transverse thermoelectric effect such as the anomalous Nernst effect.

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Inventors:

NAKATSUJI SATORU (JP)
UESUGI RYOTA (JP)
HIGO TOMOYA (JP)

Application Number:

PCT/JP2022/017602

Publication Date:

October 27, 2022

Filing Date:

April 12, 2022

Export Citation:

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Assignee:

UNIV TOKYO (JP)

International Classes:

G01J1/02; G01N25/32; H01L37/04

Domestic Patent References:

WO2021059391A1

2021-04-01

Foreign References:

JP2003166876A	2003-06-13
JPH09133578A	1997-05-20
JPH1151762A	1999-02-26
JP2020153668A	2020-09-24
JP2020107743A	2020-07-09
JP2003177064A	2003-06-27
JPH03236288A	1991-10-22
JP6095856B2	2017-03-15
JP2017037999A	2017-02-16

Other References:

W. ZHOU, H. NAKAYAMA, Y. SAKURABA: "25pD - 1 Development of flexible heat current sensor using anomalous Nernst effect", 43RD ANNUAL MEETING OF THE MAGNETICS SOCIETY OF JAPAN, SEPTEMBER 25-27, 2019, MAGNETICS SOCIETY OF JAPAN, JP, 1 September 2019 (2019-09-01) - 27 September 2019 (2019-09-27), JP, pages 81, XP009540724
ACS APPL. NANO MATER., vol. 1, no. 6, 2018, pages 2469 - 2475
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