Title:
SENSOR ELEMENT, GYRO SENSOR AND ELECTRONIC APPARATUS
Document Type and Number:
WIPO Patent Application WO/2016/088291
Kind Code:
A1
Abstract:
[Problem] To provide a sensor element capable of detecting with high accuracy an angular velocity in multiaxial directions, and provide a gyro sensor and an electronic apparatus. [Solution] A sensor element according to one aspect of the present technology is equipped with an oscillator part, an annular base part, a plurality of connecting parts, and a wiring layer. The wiring layer has a plurality of wires for driving and a plurality of wires for detecting. The plurality of wires for driving are respectively connected to first and second driving electrodes and extend adjacent to each other in a parallel manner. The plurality of wires for detecting are respectively connected to first and second detection electrodes and extend adjacent to each other in a parallel manner. The wiring layer is provided on each of the plurality of connecting parts and electrically connects a plurality of terminal parts provided on the base part with a plurality of piezoelectric driving parts and first and second piezoelectric detection parts provided on the oscillator part.
Inventors:
MITANI SATOSHI (JP)
KABASAWA HIDETOSHI (JP)
TAKAHASHI KAZUO (JP)
NIIKURA HIDEO (JP)
KABASAWA HIDETOSHI (JP)
TAKAHASHI KAZUO (JP)
NIIKURA HIDEO (JP)
Application Number:
PCT/JP2015/005278
Publication Date:
June 09, 2016
Filing Date:
October 20, 2015
Export Citation:
Assignee:
SONY CORP (JP)
International Classes:
G01C19/5677; B81B3/00; H01L41/113
Domestic Patent References:
| WO2008035683A1 | 2008-03-27 | |||
| WO2005098359A1 | 2005-10-20 |
Foreign References:
| JP4858662B2 | 2012-01-18 | |||
| JP2013092750A | 2013-05-16 | |||
| JP2012198099A | 2012-10-18 | |||
| JPH02186694A | 1990-07-20 | |||
| JP2004247615A | 2004-09-02 | |||
| JP2013002981A | 2013-01-07 | |||
| JPH10308451A | 1998-11-17 |
Attorney, Agent or Firm:
OMORI, JUNICHI (JP)
Omori Junichi (JP)
Omori Junichi (JP)
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