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Title:
SENSOR ELEMENT, AND METHOD FOR PRODUCING SENSOR ELEMENT
Document Type and Number:
WIPO Patent Application WO/2012/063818
Kind Code:
A1
Abstract:
Provided is a sensor element of which the sensitivity does not vary even when applied with a large impact and even when a tilted surface for preventing a crack from forming on the boundary region between a flexible section and a plumb bob and on the boundary region between the flexible section and a support section is disposed. Also provided is a method for producing a sensor element. The thickness of the flexible section is 10µm or less. A tilted inner wall surface is formed such that the shortest distance between the end thereof that is contiguous with the flexible surface and a first virtual tubular surface containing a main inner wall surface and extending in a direction that intersects with the aforementioned end is 0.04 R to 0.16 R when R represents the maximum diameter of the main outer wall surface of the plumb bob. A tilted outer wall surface is formed such that the shortest distance between the end thereof that is contiguous with the flexible surface and a second virtual tubular surface containing the main outer wall surface and extending along the main inner wall surface is 0.02 R to 0.08 R.

Inventors:
NAKANO Takayuki (())
中野 貴之 (())
TAMURA Masahide (())
田村 雅英 (())
Application Number:
JP2011/075717
Publication Date:
May 18, 2012
Filing Date:
November 08, 2011
Export Citation:
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Assignee:
HOKURIKU ELECTRIC INDUSTRY CO.,LTD. (3158, Shimo-okubo Toyama-sh, Toyama 92, 〒9392292, JP)
北陸電気工業株式会社 (〒92 富山県富山市下大久保3158番地 Toyama, 〒9392292, JP)
NAKANO Takayuki (())
中野 貴之 (())
TAMURA Masahide (())
International Classes:
G01C19/56; B81B3/00; B81C1/00; G01P15/09; H01L29/84; H01L41/08; H01L41/18; H01L41/22; H01L41/24
Foreign References:
JP2010160095A
JP2005017080A
JP2005203725A
JP2000235041A
JP2008190931A
Attorney, Agent or Firm:
NISHIURA Tsuguharu (NISHIURA & ASSOCIATES, Sankaido Building 8F9-13,Akasaka 1-chome,Minato-k, Tokyo 52, 〒1070052, JP)
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Claims: