Title:
SENSOR ELEMENT
Document Type and Number:
WIPO Patent Application WO/2019/021936
Kind Code:
A1
Abstract:
This sensor element comprises a first substrate, a detection unit disposed on the first substrate, and a second substrate that surrounds the first substrate and supports the first substrate. The second substrate is thicker than the first substrate. The second substrate has a connection part connected to the first substrate and a non-connection part not connected to the first substrate. The detection unit is positioned near the connection part.
Inventors:
FUKUURA ATSUOMI (JP)
Application Number:
PCT/JP2018/027127
Publication Date:
January 31, 2019
Filing Date:
July 19, 2018
Export Citation:
Assignee:
KYOCERA CORP (JP)
International Classes:
G01N5/02; G01H11/08
Domestic Patent References:
| WO2015198185A1 | 2015-12-30 | |||
| WO2011148774A1 | 2011-12-01 | |||
| WO2013157581A1 | 2013-10-24 |
Foreign References:
| JP2011203008A | 2011-10-13 | |||
| JPS57110430U | 1982-07-08 |
Attorney, Agent or Firm:
SUGIMURA Kenji (JP)
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