Title:
SENSOR ELEMENT
Document Type and Number:
WIPO Patent Application WO/2019/022082
Kind Code:
A1
Abstract:
A sensor element, provided with a first substrate, a second substrate, and a piezoresistive element disposed on the upper surface of the second substrate. The first substrate has an upwardly projecting protrusion. The second substrate has a recess having the protrusion disposed therein. The recess has a thin-walled part on the bottom surface of the recess, and a thick-walled part on the inner side surface of the recess.
Inventors:
ABE SHINICHI (JP)
Application Number:
PCT/JP2018/027728
Publication Date:
January 31, 2019
Filing Date:
July 24, 2018
Export Citation:
Assignee:
KYOCERA CORP (JP)
International Classes:
H01L29/84; G01N5/02
Domestic Patent References:
| WO2016056555A1 | 2016-04-14 |
Foreign References:
| JP2014153135A | 2014-08-25 | |||
| JP2005227283A | 2005-08-25 |
Attorney, Agent or Firm:
SUGIMURA Kenji (JP)
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